Nano-oxidation of semiconductor heterostructures with atomic force microscopes: technology and applications

Heinzel, Thomas and Lüscher, Silvia and Fuhrer, Andreas and Salis, Gian and Held, Ryan and Ensslin, Klaus and Wegscheider, Werner (2000) Nano-oxidation of semiconductor heterostructures with atomic force microscopes: technology and applications. In: Andrews, David L. and Asakura, Toshimitsu and Jutamulia, Suganda and Kirk, Wiley P. and Lagally, Max G. and Lal, Ravindra B. and Trolinger, James D., (eds.) Optical devices and diagnostics in materials science: 1-4 August2000, San Diego, USA. SPIE proceedings series, 4098. Society of Photo-Optical Instrumentation Engineers, Bellingham, Washington, p. 52. ISBN 0-8194-3743-3.

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