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Nano-oxidation of semiconductor heterostructures with atomic force microscopes: technology and applications

Heinzel, Thomas and Lüscher, Silvia and Fuhrer, Andreas and Salis, Gian and Held, Ryan and Ensslin, Klaus and Wegscheider, Werner (2000) Nano-oxidation of semiconductor heterostructures with atomic force microscopes: technology and applications. In: Andrews, David L. and Asakura, Toshimitsu and Jutamulia, Suganda and Kirk, Wiley P. and Lagally, Max G. and Lal, Ravindra B. and Trolinger, James D., (eds.) Optical devices and diagnostics in materials science: 1-4 August2000, San Diego, USA. SPIE proceedings series, 4098. Society of Photo-Optical Instrumentation Engineers, Bellingham, Washington, p. 52. ISBN 0-8194-3743-3.

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Item Type:Book Section
Date:2000
Institutions:Physics > Institute of Experimental and Applied Physics > Retired Professors > Group Werner Wegscheider
Identification Number:
ValueType
10.1117/12.401643DOI
Subjects:500 Science > 530 Physics
Status:Published
Refereed:Unknown
Created at the University of Regensburg:Unknown
Owner: Martin Kaiser
Deposited On:08 Feb 2010 13:20
Last Modified:08 Feb 2010 13:20
Item ID:12740
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