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Extensions of non-negative matrix factorization and their application to the analysis of wafer test data

URN to cite this document: urn:nbn:de:bvb:355-epub-150585

Schachtner, Reinhard (2010) Extensions of non-negative matrix factorization and their application to the analysis of wafer test data. PhD, Universität Regensburg

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Abstract (English)

This PhD thesis investigates the data analysis technique named non-negative matrix factorization (NMF) and its applicability for failure analysis in microchip production. A blind source separation approach is pursued in which the observable wafer test data is interpreted as the result of a superposition of several simultaneously acting and not directly observable failure causes. This thesis was ...

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Translation of the abstract (German)

Die vorliegende Dissertation untersucht das Datenanalyseverfahren der nicht-negativen Matrixfaktorisierung (NMF) und deren Anwendbarkeit zur Fehleranalyse in der Mikrochipproduktion. Dabei wird ein Ansatz zur blinden Quellentrennung verfolgt, bei dem beobachtete Wafertestdaten als Ergebnis der Überlagerung von mehreren gleichzeitig agierenden, nicht direkt beobachtbaren Fehlerquellen ...

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Export bibliographical data

Item Type:Thesis of the University of Regensburg (PhD)
Date:4 August 2010
Referee:Prof. Dr. Elmar W. Lang and Prof. Dr. Ingo Morgenstern
Date of exam:23 April 2010
Institutions:Biology, Preclinical Medicine > Institut für Biophysik und physikalische Biochemie > Prof. Dr. Elmar Lang
Research groups and research centres:Not selected
Keywords:non-negative matrix factorization, NMF, wafer test data, uniqueness, Bayesian, binary NMF
Subjects:500 Science > 530 Physics
Status:Published
Refereed:Yes, this version has been refereed
Created at the University of Regensburg:Yes
Owner: Universitätsbibliothek Regensburg
Deposited On:04 Aug 2010 13:37
Last Modified:13 Mar 2014 13:52
Item ID:15058
Owner Only: item control page
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