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PCA and ICA analysis of process control data obtained during si-wafer manufacturing

Ganslmeier, B. and Schels, A. and Lang, Elmar W. (2000) PCA and ICA analysis of process control data obtained during si-wafer manufacturing. In: Hamza, M. H., (ed.) Signal processing and communications: proceedings of the IASTED international conference (SPC), September 19 - 22, 2000, Marbella, Spain. IASTED/Acta Press, Anaheim, pp. 72-77. ISBN 0-88986-302-4.

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Item Type:Book Section
Date:2000
Additional information (public):Tagungsort auf Titelblatt irrtümlich als "Marabella" angegeben
Institutions:Biology, Preclinical Medicine > Institut für Biophysik und physikalische Biochemie > Prof. Dr. Elmar Lang
Subjects:500 Science > 570 Life sciences
Status:Published
Refereed:Unknown
Created at the University of Regensburg:Unknown
Owner: Gertraud Kellers
Deposited On:20 Oct 2010 06:32
Last Modified:20 Oct 2010 06:32
Item ID:17373
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