Deutsch
Ganslmeier, B. and Schels, A. and Lang, Elmar W. (2000) PCA and ICA analysis of process control data obtained during si-wafer manufacturing. In: Hamza, M. H., (ed.) Signal processing and communications: proceedings of the IASTED international conference (SPC), September 19 - 22, 2000, Marbella, Spain. IASTED/Acta Press, Anaheim, pp. 72-77. ISBN 0-88986-302-4.
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| Item Type: | Book Section |
|---|---|
| Additional information (public): | Tagungsort auf Titelblatt irrtümlich als "Marabella" angegeben |
| Institutions: | Biology, Preclinical Medicine > Institut für Biophysik und physikalische Biochemie > Prof. Dr. Elmar Lang |
| Subjects: | 500 Science > 570 Life sciences |
| Status: | Published |
| Refereed: | Unknown |
| Created at the University of Regensburg: | Unknown |
| Owner: | Gertraud Kellers |
| Deposited On: | 20 Oct 2010 08:32 |
| Last Modified: | 20 Oct 2010 08:32 |
| Item ID: | 17373 |
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