Giessibl, Franz J. and Pielmeier, Florian and Eguchi, Toyoaki and An, Toshu and Hasegawa, Yukio
Comparison of force sensors for atomic force microscopy based on quartz tuning forks and length-extensional resonators.
Physical Review B (PRB) 84 (12), p. 125409.
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Other URL: http://link.aps.org/doi/10.1103/PhysRevB.84.125409
The force sensor is key to the performance of atomic force microscopy (AFM). Nowadays, most atomic force microscopes use micromachined force sensors made from silicon, but piezoelectric quartz sensors are being applied at an increasing rate, mainly in vacuum. These self-sensing force sensors allow a relatively easy upgrade of a scanning tunneling microscope to a combined scanning tunneling/atomic ...
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