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Comparison of force sensors for atomic force microscopy based on quartz tuning forks and length-extensional resonators

Giessibl, Franz J. and Pielmeier, Florian and Eguchi, Toyoaki and An, Toshu and Hasegawa, Yukio (2011) Comparison of force sensors for atomic force microscopy based on quartz tuning forks and length-extensional resonators. Physical Review B (PRB) 84 (12), p. 125409.

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Other URL: http://link.aps.org/doi/10.1103/PhysRevB.84.125409


Abstract

The force sensor is key to the performance of atomic force microscopy (AFM). Nowadays, most atomic force microscopes use micromachined force sensors made from silicon, but piezoelectric quartz sensors are being applied at an increasing rate, mainly in vacuum. These self-sensing force sensors allow a relatively easy upgrade of a scanning tunneling microscope to a combined scanning tunneling/atomic ...

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Item Type:Article
Date:2011
Institutions:Physics > Institute of Experimental and Applied Physics > Chair Professor Giessibl > Group Franz J. Giessibl
Identification Number:
ValueType
10.1103/PhysRevB.84.125409DOI
Classification:
NotationType
UNSPECIFIED
Subjects:500 Science > 530 Physics
Status:Published
Refereed:Unknown
Created at the University of Regensburg:Unknown
Owner: Petra Wild
Deposited On:05 Jul 2012 06:10
Last Modified:13 Mar 2014 18:59
Item ID:25268
Owner Only: item control page
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