Doping behaviour of implanted magnesium in silicon

Sigmund, H. and Weiss, Dieter (1983) Doping behaviour of implanted magnesium in silicon. In: Ryssel, H., (ed.) Ion Implantation: Equipment and Techniques; proceedings of the 4. Internat. Conference Berchtesgaden, Fed. Rep. of Germany, Sept. 13-17, 1982. Springer Series in Electrophysics, 11. Springer, Berlin, pp. 473-480. ISBN 3-540-12491-8, 0-387-12491-8.

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