Weiss, Dieter and Grambow, P. and Klitzing, Klaus von and Menschig, A. and Weimann, G.
Fabrication and Characterization of Deep Mesa Echted "Anti"-dot Superlattices in GaAs-AlGaAs Heterostructures.
Applied Physics Letters 58, pp. 2960-2963.
Other URL: http://link.aip.org/link/APPLAB/v58/i25/p2960/s1, http://scitation.aip.org/apl/
By etching a periodic array of holes through a ;mobility two-dimensional electron gas we define high-a lateral, ``anti\'\'-dot-type superlattice with periods a=200 and a=300 nm, much smaller than the electron mean free path in the unpatterned material. The devices are fabricated using electron beam lithography and reactive ion etching techniques, and characterized by magnetotransport ...
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