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Fabrication and Characterization of Deep Mesa Echted "Anti"-dot Superlattices in GaAs-AlGaAs Heterostructures

Weiss, Dieter and Grambow, P. and Klitzing, Klaus von and Menschig, A. and Weimann, G. (1991) Fabrication and Characterization of Deep Mesa Echted "Anti"-dot Superlattices in GaAs-AlGaAs Heterostructures. Applied Physics Letters 58, pp. 2960-2963.

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Other URL: http://link.aip.org/link/APPLAB/v58/i25/p2960/s1, http://scitation.aip.org/apl/


Abstract

By etching a periodic array of holes through a ;mobility two-dimensional electron gas we define high-a lateral, ``anti\'\'-dot-type superlattice with periods a=200 and a=300 nm, much smaller than the electron mean free path in the unpatterned material. The devices are fabricated using electron beam lithography and reactive ion etching techniques, and characterized by magnetotransport ...

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Item Type:Article
Date:1991
Institutions:Physics > Institute of Experimental and Applied Physics > Chair Professor Weiss > Group Dieter Weiss
Classification:
NotationType
73.21.-bPACS
73.50.JtPACS
73.61.EyPACS
Subjects:500 Science > 530 Physics
Status:Published
Refereed:Yes, this version has been refereed
Created at the University of Regensburg:Unknown
Owner: Universitätsbibliothek Regensburg
Deposited On:25 May 2009 13:19
Last Modified:13 Mar 2014 18:09
Item ID:7862
Owner Only: item control page
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