Rahm, M and Raabe, Jörg and Pulwey, Ralph and Biberger, Josef and Meier, C and Wegscheider, Werner and Weiss, Dieter (2002) Planar Hall sensors for micro-Hall-magnetometry. Journal of Applied Physics 91, p. 7980.
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In this work we present a new method to fabricate planar Hall sensors from GaAs AlGaAs heterojunctions, which can be used to examine the local stray field at a specific section of a micron-sized magnet. Instead of mesa etching we implanted oxygen ions with an energy of 1.5 keV which deplete the two- dimensional electron gas underneath the exposed areas but leave the wafer flat. Planar double Hall cross devices were employed to investigate 30 nm thick electroplated Ni rings with outer and inner diameters ranging from 1.2 to 2 µm and from 0.3 to 1.6 µm, respectively. By comparing the signals from both Hall crosses of the sensor, we can distinguish between local stray field variations and changes of the global magnetization pattern. A hysteresis loop measured at a temperature of 110 K suggests that magnetization reversal occurs via a magnetic vortex structure.
|Institutions:||Physics > Institute of Experimental and Applied Physics > Chair Professor Weiss > Group Dieter Weiss|
|Subjects:||500 Science > 530 Physics|
|Refereed:||Yes, this version has been refereed|
|Created at the University of Regensburg:||Yes|
|Deposited On:||25 May 2009 13:20|
|Last Modified:||09 Dec 2009 04:04|