Rahm, M and Raabe, Jörg and Pulwey, Ralph and Biberger, Josef and Meier, C and Wegscheider, Werner and Weiss, Dieter (2002) Planar Hall sensors for micro-Hall-magnetometry. Journal of Applied Physics 91, p. 7980.
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In this work we present a new method to fabricate planar Hall sensors from GaAs AlGaAs heterojunctions, which can be used to examine the local stray field at a specific section of a micron-sized magnet. Instead of mesa etching we implanted oxygen ions with an energy of 1.5 keV which deplete the two- dimensional electron gas underneath the exposed areas but leave the wafer flat. Planar ...
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|Institutions:||Physics > Institute of Experimental and Applied Physics > Chair Professor Weiss > Group Dieter Weiss|
|Dewey Decimal Classification:||500 Science > 530 Physics|
|Refereed:||Yes, this version has been refereed|
|Created at the University of Regensburg:||Yes|
|Deposited on:||25 May 2009 13:20|
|Last modified:||09 Dec 2009 04:04|