Petter, K. and Kipp, T. and Heitmann, Detlef and Heyn, Ch. and Schüller, Christian (2002) Fabrication of large periodic arrays of AlGaAs microdisks by laser-interference lithography and selective etching. Applied Physics Letters 81 (4; 3 S), p. 592.
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By laser-interference lithography, reactive-ion etching, and selective wet-chemical etching using a citric acid-based solution, we have fabricated large periodic arrays of AlGaAs microdisks with periods of 4 µm and disk diameters between 1.5 and 2 µm. The arrays are characterized by temperature-dependent photoluminescence spectroscopy. Taking into account the below-threshold absorption of the quantum wells inside the disks, we get disk quality factors close to the theoretical maximum value. We demonstrate that our technique allows one also to produce one-dimensionally or two-dimensionally coupled arrays of microdisks.
|Date:||24 May 2002|
|Institutions:||Physics > Institute of Experimental and Applied Physics > Chair Professor Lupton > Group Christian Schüller|
|Subjects:||500 Science > 530 Physics|
|Created at the University of Regensburg:||Unknown|
|Deposited On:||21 Sep 2009 07:18|
|Last Modified:||20 Jul 2011 21:44|