Startseite UB

Fabrication of large periodic arrays of AlGaAs microdisks by laser-interference lithography and selective etching

Petter, K. and Kipp, T. and Heitmann, Detlef and Heyn, Ch. and Schüller, Christian (2002) Fabrication of large periodic arrays of AlGaAs microdisks by laser-interference lithography and selective etching. Applied Physics Letters 81 (4; 3 S), p. 592.

[img]PDF
Download (356kB) - Repository staff only

at publisher (via DOI)

Other URL: http://link.aip.org/link/?APPLAB/81/592/1


Abstract

By laser-interference lithography, reactive-ion etching, and selective wet-chemical etching using a citric acid-based solution, we have fabricated large periodic arrays of AlGaAs microdisks with periods of 4 µm and disk diameters between 1.5 and 2 µm. The arrays are characterized by temperature-dependent photoluminescence spectroscopy. Taking into account the below-threshold absorption of the ...

plus


Export bibliographical data



Item Type:Article
Date:24 May 2002
Institutions:Physics > Institute of Experimental and Applied Physics > Chair Professor Lupton > Group Christian Schüller
Identification Number:
ValueType
10.1063/1.1495082DOI
Subjects:500 Science > 530 Physics
Status:Published
Refereed:Unknown
Created at the University of Regensburg:Unknown
Owner: Martin Kaiser
Deposited On:21 Sep 2009 07:18
Last Modified:13 Mar 2014 11:01
Item ID:9497
Owner Only: item control page

Downloads

Downloads per month over past year

  1. University

University Library

Publication Server

Contact person
Gernot Deinzer

Telefon 0941 943-2759
Contact