Petter, K. and Kipp, T. and Heitmann, Detlef and Heyn, Ch. and Schüller, Christian (2002) Fabrication of large periodic arrays of AlGaAs microdisks by laser-interference lithography and selective etching. Applied Physics Letters 81 (4; 3 S), p. 592.
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By laser-interference lithography, reactive-ion etching, and selective wet-chemical etching using a citric acid-based solution, we have fabricated large periodic arrays of AlGaAs microdisks with periods of 4 µm and disk diameters between 1.5 and 2 µm. The arrays are characterized by temperature-dependent photoluminescence spectroscopy. Taking into account the below-threshold absorption of the ...
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|Date:||24 May 2002|
|Institutions:||Physics > Institute of Experimental and Applied Physics > Chair Professor Lupton > Group Christian Schüller|
|Dewey Decimal Classification:||500 Science > 530 Physics|
|Created at the University of Regensburg:||Unknown|
|Deposited On:||21 Sep 2009 07:18|
|Last Modified:||13 Mar 2014 11:01|