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Article

Prüßing, Jan K., Böckendorf, Tim, Kipke, Felix, Xu, Jiushuai, Puranto, Prabowo, Lundsgaard Hansen, John, Bougeard, Dominique, Peiner, Erwin and Bracht, Hartmut (2022) Retarded boron and phosphorus diffusion in silicon nanopillars due to stress induced vacancy injection. Journal of Applied Physics 131 (7). Fulltext not available.

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