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In-plane gates and nanostructures fabricated by direct oxidation of semiconductor heterostructures with an atomic force microscope
Held, R., Vancura, T., Heinzel, Thomas, Ensslin, Klaus, Holland, M. and Wegscheider, Werner (1998) In-plane gates and nanostructures fabricated by direct oxidation of semiconductor heterostructures with an atomic force microscope. Applied Physics Letters 73 (2), pp. 262-264.Date of publication of this fulltext: 09 Nov 2009 13:17
Article
DOI to cite this document: 10.5283/epub.10881
Abstract
The surface of shallow Ga[Al]As heterostructures is locally oxidized with an atomic force microscope. The electron gas underneath the oxide is depleted. We demonstrate experimentally that these depleted regions of the two-dimensional electron gas can be made highly resistive at liquid nitrogen temperatures. Thus, local anodic oxidation of high electron mobility transistors with an atomic force ...
The surface of shallow Ga[Al]As heterostructures is locally oxidized with an atomic force microscope. The electron gas underneath the oxide is depleted. We demonstrate experimentally that these depleted regions of the two-dimensional electron gas can be made highly resistive at liquid nitrogen temperatures. Thus, local anodic oxidation of high electron mobility transistors with an atomic force microscope provides a novel method to define nanostructures and in-plane gates. Two examples, namely antidots and quantum point contacts as in-plane gate transistors have been fabricated and their performance at low temperatures is discussed.
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| Item type | Article | ||||
| Journal or Publication Title | Applied Physics Letters | ||||
| Publisher: | American Institute of Physics | ||||
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| Volume: | 73 | ||||
| Number of Issue or Book Chapter: | 2 | ||||
| Page Range: | pp. 262-264 | ||||
| Date | 13 July 1998 | ||||
| Institutions | Physics > Institute of Experimental and Applied Physics > Alumni or Retired Professors > Group Werner Wegscheider | ||||
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| Dewey Decimal Classification | 500 Science > 530 Physics | ||||
| Status | Published | ||||
| Refereed | Unknown | ||||
| Created at the University of Regensburg | Unknown | ||||
| Item ID | 10881 |
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