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Held, R. ; Vancura, T. ; Heinzel, Thomas ; Ensslin, Klaus ; Holland, M. ; Wegscheider, Werner

In-plane gates and nanostructures fabricated by direct oxidation of semiconductor heterostructures with an atomic force microscope

Held, R., Vancura, T., Heinzel, Thomas, Ensslin, Klaus, Holland, M. and Wegscheider, Werner (1998) In-plane gates and nanostructures fabricated by direct oxidation of semiconductor heterostructures with an atomic force microscope. Applied Physics Letters 73 (2), pp. 262-264.

Date of publication of this fulltext: 09 Nov 2009 13:17
Article
DOI to cite this document: 10.5283/epub.10881


Abstract

The surface of shallow Ga[Al]As heterostructures is locally oxidized with an atomic force microscope. The electron gas underneath the oxide is depleted. We demonstrate experimentally that these depleted regions of the two-dimensional electron gas can be made highly resistive at liquid nitrogen temperatures. Thus, local anodic oxidation of high electron mobility transistors with an atomic force ...

The surface of shallow Ga[Al]As heterostructures is locally oxidized with an atomic force microscope. The electron gas underneath the oxide is depleted. We demonstrate experimentally that these depleted regions of the two-dimensional electron gas can be made highly resistive at liquid nitrogen temperatures. Thus, local anodic oxidation of high electron mobility transistors with an atomic force microscope provides a novel method to define nanostructures and in-plane gates. Two examples, namely antidots and quantum point contacts as in-plane gate transistors have been fabricated and their performance at low temperatures is discussed.



Involved Institutions


Details

Item typeArticle
Journal or Publication TitleApplied Physics Letters
Publisher:American Institute of Physics
Volume:73
Number of Issue or Book Chapter:2
Page Range:pp. 262-264
Date13 July 1998
InstitutionsPhysics > Institute of Experimental and Applied Physics > Alumni or Retired Professors > Group Werner Wegscheider
Identification Number
ValueType
10.1063/1.121774DOI
Related URLs
URLURL Type
http://link.aip.org/link/?APPLAB/73/262/1Publisher
Dewey Decimal Classification500 Science > 530 Physics
StatusPublished
RefereedUnknown
Created at the University of RegensburgUnknown
Item ID10881

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