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In-plane gates and nanostructures fabricated by direct oxidation of semiconductor heterostructures with an atomic force microscope
Held, R., Vancura, T., Heinzel, Thomas, Ensslin, Klaus, Holland, M. und Wegscheider, Werner (1998) In-plane gates and nanostructures fabricated by direct oxidation of semiconductor heterostructures with an atomic force microscope. Applied Physics Letters 73 (2), S. 262-264.Veröffentlichungsdatum dieses Volltextes: 09 Nov 2009 13:17
Artikel
DOI zum Zitieren dieses Dokuments: 10.5283/epub.10881
Zusammenfassung
The surface of shallow Ga[Al]As heterostructures is locally oxidized with an atomic force microscope. The electron gas underneath the oxide is depleted. We demonstrate experimentally that these depleted regions of the two-dimensional electron gas can be made highly resistive at liquid nitrogen temperatures. Thus, local anodic oxidation of high electron mobility transistors with an atomic force ...
The surface of shallow Ga[Al]As heterostructures is locally oxidized with an atomic force microscope. The electron gas underneath the oxide is depleted. We demonstrate experimentally that these depleted regions of the two-dimensional electron gas can be made highly resistive at liquid nitrogen temperatures. Thus, local anodic oxidation of high electron mobility transistors with an atomic force microscope provides a novel method to define nanostructures and in-plane gates. Two examples, namely antidots and quantum point contacts as in-plane gate transistors have been fabricated and their performance at low temperatures is discussed.
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| Dokumentenart | Artikel | ||||
| Titel eines Journals oder einer Zeitschrift | Applied Physics Letters | ||||
| Verlag: | American Institute of Physics | ||||
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| Band: | 73 | ||||
| Nummer des Zeitschriftenheftes oder des Kapitels: | 2 | ||||
| Seitenbereich: | S. 262-264 | ||||
| Datum | 13 Juli 1998 | ||||
| Institutionen | Physik > Institut für Experimentelle und Angewandte Physik > Entpflichtete oder im Ruhestand befindliche Professoren > Arbeitsgruppe Werner Wegscheider | ||||
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| Dewey-Dezimal-Klassifikation | 500 Naturwissenschaften und Mathematik > 530 Physik | ||||
| Status | Veröffentlicht | ||||
| Begutachtet | Unbekannt / Keine Angabe | ||||
| An der Universität Regensburg entstanden | Unbekannt / Keine Angabe | ||||
| Dokumenten-ID | 10881 |
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