Direkt zum Inhalt

Owner only: item control page
Rogge, M. C. ; Fühner, C. ; Keyser, U. F. ; Haug, R. J. ; Bichler, Max ; Abstreiter, Gerhard ; Wegscheider, Werner

Combined atomic force microscope and electron-beam lithography used for the fabrication of variable-coupling quantum dots

Rogge, M. C., Fühner, C., Keyser, U. F. , Haug, R. J. , Bichler, Max, Abstreiter, Gerhard and Wegscheider, Werner (2003) Combined atomic force microscope and electron-beam lithography used for the fabrication of variable-coupling quantum dots. Applied Physics Letters 83 (6), pp. 1163-1165.

Date of publication of this fulltext: 14 Dec 2009 13:20
Article
DOI to cite this document: 10.5283/epub.11353


Abstract

We have combined direct nanofabrication by local anodic oxidation with conventional electron-beam lithography to produce a parallel double quantum dot based on a GaAs/AlGaAs heterostructure. The combination of both nanolithography methods allows fabrication of robust in-plane gates and Cr/Au top-gate electrodes on the same device for optimal controllability. This is illustrated by the tunability ...

We have combined direct nanofabrication by local anodic oxidation with conventional electron-beam lithography to produce a parallel double quantum dot based on a GaAs/AlGaAs heterostructure. The combination of both nanolithography methods allows fabrication of robust in-plane gates and Cr/Au top-gate electrodes on the same device for optimal controllability. This is illustrated by the tunability of the interdot coupling in our device. We describe our fabrication and alignment scheme in detail and demonstrate the tunability in low-temperature transport measurements. (C) 2003 American Institute of Physics.



Involved Institutions


Details

Item typeArticle
Journal or Publication TitleApplied Physics Letters
Publisher:AMER INST PHYSICS
Place of Publication:MELVILLE
Volume:83
Number of Issue or Book Chapter:6
Page Range:pp. 1163-1165
Date11 August 2003
InstitutionsPhysics > Institute of Experimental and Applied Physics > Alumni or Retired Professors > Group Werner Wegscheider
Identification Number
ValueType
10.1063/1.1599972DOI
Related URLs
URLURL Type
http://link.aip.org/link/?APPLAB/83/1163/1Publisher
Classification
NotationType
81.16.Nd; 81.16.Ta; 81.07.Ta; 81.05.Ea; 68.47.Fg; 68.65.Hb; 85.40.Hp; 81.65.MqPACS
KeywordsCOULOMB-BLOCKADE; TRANSISTOR; OXIDATION; TRANSPORT; CHANNEL;
Dewey Decimal Classification500 Science > 530 Physics
StatusPublished
RefereedUnknown
Created at the University of RegensburgUnknown
Item ID11353

Export bibliographical data

Owner only: item control page

nach oben