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Combined atomic force microscope and electron-beam lithography used for the fabrication of variable-coupling quantum dots
Rogge, M. C., Fühner, C., Keyser, U. F.
, Haug, R. J.
, Bichler, Max, Abstreiter, Gerhard and Wegscheider, Werner
(2003)
Combined atomic force microscope and electron-beam lithography used for the fabrication of variable-coupling quantum dots.
Applied Physics Letters 83 (6), pp. 1163-1165.
Date of publication of this fulltext: 14 Dec 2009 13:20
Article
DOI to cite this document: 10.5283/epub.11353
Abstract
We have combined direct nanofabrication by local anodic oxidation with conventional electron-beam lithography to produce a parallel double quantum dot based on a GaAs/AlGaAs heterostructure. The combination of both nanolithography methods allows fabrication of robust in-plane gates and Cr/Au top-gate electrodes on the same device for optimal controllability. This is illustrated by the tunability ...
We have combined direct nanofabrication by local anodic oxidation with conventional electron-beam lithography to produce a parallel double quantum dot based on a GaAs/AlGaAs heterostructure. The combination of both nanolithography methods allows fabrication of robust in-plane gates and Cr/Au top-gate electrodes on the same device for optimal controllability. This is illustrated by the tunability of the interdot coupling in our device. We describe our fabrication and alignment scheme in detail and demonstrate the tunability in low-temperature transport measurements. (C) 2003 American Institute of Physics.
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Details
| Item type | Article | ||||
| Journal or Publication Title | Applied Physics Letters | ||||
| Publisher: | AMER INST PHYSICS | ||||
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| Place of Publication: | MELVILLE | ||||
| Volume: | 83 | ||||
| Number of Issue or Book Chapter: | 6 | ||||
| Page Range: | pp. 1163-1165 | ||||
| Date | 11 August 2003 | ||||
| Institutions | Physics > Institute of Experimental and Applied Physics > Alumni or Retired Professors > Group Werner Wegscheider | ||||
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| Keywords | COULOMB-BLOCKADE; TRANSISTOR; OXIDATION; TRANSPORT; CHANNEL; | ||||
| Dewey Decimal Classification | 500 Science > 530 Physics | ||||
| Status | Published | ||||
| Refereed | Unknown | ||||
| Created at the University of Regensburg | Unknown | ||||
| Item ID | 11353 |
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