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Nanometre spaced electrodes on a cleaved AlGaAs surface

Luber, Sebastian M., Strobel, Sebastian, Tranitz, Hans-Peter, Wegscheider, Werner, Schuh, Dieter and Tornow, Marc (2005) Nanometre spaced electrodes on a cleaved AlGaAs surface. Nanotechnology 16 (8), pp. 1182-1185.

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We present a novel technique for fabricating nanometre spaced metal electrodes on a smooth crystal cleavage plane with precisely predetermined spacing. Our method does not require any high-resolution nanolithography tools, all lateral patterning being based on conventional optical lithography. Using molecular beam epitaxy we embedded a thin gallium arsenide (GaAs) layer in between two aluminium ...


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Item type:Article
Date:August 2005
Institutions:Physics > Institute of Experimental and Applied Physics > Alumni or Retired Professors > Group Werner Wegscheider
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Dewey Decimal Classification:500 Science > 530 Physics
Created at the University of Regensburg:Unknown
Item ID:11963
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