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Depth profile of strain and composition in Si/Ge dot multilayers by microscopic phonon Raman spectroscopy
Tan, P. H., Bougeard, Dominique, Abstreiter, Gerhard und Brunner, K. (2005) Depth profile of strain and composition in Si/Ge dot multilayers by microscopic phonon Raman spectroscopy. J. Appl. Phys. 98, S. 113517.Veröffentlichungsdatum dieses Volltextes: 05 Mrz 2013 07:24
Artikel
DOI zum Zitieren dieses Dokuments: 10.5283/epub.27792
Zusammenfassung
We characterized strain and Ge content depending on depth in a self-assembled Si/Ge dot multilayer by scanning a microscopic Raman probe at a (110) cleavage plane. The multilayer structure was deposited by molecular-beam epitaxy on a (001) Si substrate and consisted of 80 periods, each of them composed by 25 nm Si spacers and 8 monolayer Ge forming laterally and vertically uncorrelated islands ...
We characterized strain and Ge content depending on depth in a self-assembled Si/Ge dot multilayer by scanning a microscopic Raman probe at a (110) cleavage plane. The multilayer structure was deposited by molecular-beam epitaxy on a (001) Si substrate and consisted of 80 periods, each of them composed by 25 nm Si spacers and 8 monolayer Ge forming laterally and vertically uncorrelated islands with a height of 2 nm and a lateral diameter of about 20 nm. An average biaxial strain of -3.5% within the core regions of islands is determined from the splitting of longitudinal and transversal optical Ge-Ge phonon modes observed in polarized Raman measurements. The absolute mode frequencies further enable analysis of a Ge content of 0.82. The analyzed strain and composition of islands are nearly independent from depths below the sample surface. This indicates well-controlled deposition parameters and negligible intermixing during deposition of subsequent layers. These Raman results are in agreement with x-ray diffraction data. Small, local Raman frequency shifts were observed and discussed with respect to partial elastic strain relaxation of the multilayer stack after cleavage, undefined Raman-scattering geometries at the sample edge, and local heating by the laser probe.
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| Dokumentenart | Artikel | ||||
| Titel eines Journals oder einer Zeitschrift | J. Appl. Phys. | ||||
| Verlag: | American Institute of Physics (AIP) | ||||
|---|---|---|---|---|---|
| Band: | 98 | ||||
| Seitenbereich: | S. 113517 | ||||
| Datum | 2005 | ||||
| Institutionen | Physik > Institut für Experimentelle und Angewandte Physik > Lehrstuhl Professor Huber > Arbeitsgruppe Dominique Bougeard | ||||
| Identifikationsnummer |
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| Dewey-Dezimal-Klassifikation | 500 Naturwissenschaften und Mathematik > 530 Physik | ||||
| Status | Veröffentlicht | ||||
| Begutachtet | Ja, diese Version wurde begutachtet | ||||
| An der Universität Regensburg entstanden | Nein | ||||
| URN der UB Regensburg | urn:nbn:de:bvb:355-epub-277920 | ||||
| Dokumenten-ID | 27792 |
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