Direkt zum Inhalt

Tan, P. H. ; Bougeard, Dominique ; Abstreiter, Gerhard ; Brunner, K.

Depth profile of strain and composition in Si/Ge dot multilayers by microscopic phonon Raman spectroscopy

Tan, P. H., Bougeard, Dominique, Abstreiter, Gerhard und Brunner, K. (2005) Depth profile of strain and composition in Si/Ge dot multilayers by microscopic phonon Raman spectroscopy. J. Appl. Phys. 98, S. 113517.

Veröffentlichungsdatum dieses Volltextes: 05 Mrz 2013 07:24
Artikel
DOI zum Zitieren dieses Dokuments: 10.5283/epub.27792


Zusammenfassung

We characterized strain and Ge content depending on depth in a self-assembled Si/Ge dot multilayer by scanning a microscopic Raman probe at a (110) cleavage plane. The multilayer structure was deposited by molecular-beam epitaxy on a (001) Si substrate and consisted of 80 periods, each of them composed by 25 nm Si spacers and 8 monolayer Ge forming laterally and vertically uncorrelated islands ...

We characterized strain and Ge content depending on depth in a self-assembled Si/Ge dot multilayer by scanning a microscopic Raman probe at a (110) cleavage plane. The multilayer structure was deposited by molecular-beam epitaxy on a (001) Si substrate and consisted of 80 periods, each of them composed by 25 nm Si spacers and 8 monolayer Ge forming laterally and vertically uncorrelated islands with a height of 2 nm and a lateral diameter of about 20 nm. An average biaxial strain of -3.5% within the core regions of islands is determined from the splitting of longitudinal and transversal optical Ge-Ge phonon modes observed in polarized Raman measurements. The absolute mode frequencies further enable analysis of a Ge content of 0.82. The analyzed strain and composition of islands are nearly independent from depths below the sample surface. This indicates well-controlled deposition parameters and negligible intermixing during deposition of subsequent layers. These Raman results are in agreement with x-ray diffraction data. Small, local Raman frequency shifts were observed and discussed with respect to partial elastic strain relaxation of the multilayer stack after cleavage, undefined Raman-scattering geometries at the sample edge, and local heating by the laser probe.



Beteiligte Einrichtungen


Details

DokumentenartArtikel
Titel eines Journals oder einer ZeitschriftJ. Appl. Phys.
Verlag:American Institute of Physics (AIP)
Band:98
Seitenbereich:S. 113517
Datum2005
InstitutionenPhysik > Institut für Experimentelle und Angewandte Physik > Lehrstuhl Professor Huber > Arbeitsgruppe Dominique Bougeard
Identifikationsnummer
WertTyp
10.1063/1.2140078DOI
Dewey-Dezimal-Klassifikation500 Naturwissenschaften und Mathematik > 530 Physik
StatusVeröffentlicht
BegutachtetJa, diese Version wurde begutachtet
An der Universität Regensburg entstandenNein
URN der UB Regensburgurn:nbn:de:bvb:355-epub-277920
Dokumenten-ID27792

Bibliographische Daten exportieren

Nur für Besitzer und Autoren: Kontrollseite des Eintrags

nach oben