Direkt zum Inhalt

Tan, P. H. ; Bougeard, Dominique ; Abstreiter, Gerhard ; Brunner, K.

Depth profile of strain and composition in Si/Ge dot multilayers by microscopic phonon Raman spectroscopy

Artikel

Tan, P. H., Bougeard, Dominique, Abstreiter, Gerhard und Brunner, K. (2005) Depth profile of strain and composition in Si/Ge dot multilayers by microscopic phonon Raman spectroscopy. J. Appl. Phys. 98, S. 113517.

DOI zum Zitieren dieses Dokuments: 10.5283/epub.27792


Zusammenfassung

We characterized strain and Ge content depending on depth in a self-assembled Si/Ge dot multilayer by scanning a microscopic Raman probe at a (110) cleavage plane. The multilayer structure was deposited by molecular-beam epitaxy on a (001) Si substrate and consisted of 80 periods, each of them composed by 25 nm Si spacers and 8 monolayer Ge forming laterally and vertically uncorrelated islands ...

We characterized strain and Ge content depending on depth in a self-assembled Si/Ge dot multilayer by scanning a microscopic Raman probe at a (110) cleavage plane. The multilayer structure was deposited by molecular-beam epitaxy on a (001) Si substrate and consisted of 80 periods, each of them composed by 25 nm Si spacers and 8 monolayer Ge forming laterally and vertically uncorrelated islands with a height of 2 nm and a lateral diameter of about 20 nm. An average biaxial strain of -3.5% within the core regions of islands is determined from the splitting of longitudinal and transversal optical Ge-Ge phonon modes observed in polarized Raman measurements. The absolute mode frequencies further enable analysis of a Ge content of 0.82. The analyzed strain and composition of islands are nearly independent from depths below the sample surface. This indicates well-controlled deposition parameters and negligible intermixing during deposition of subsequent layers. These Raman results are in agreement with x-ray diffraction data. Small, local Raman frequency shifts were observed and discussed with respect to partial elastic strain relaxation of the multilayer stack after cleavage, undefined Raman-scattering geometries at the sample edge, and local heating by the laser probe.



Beteiligte Einrichtungen


Details

DokumentenartArtikel
Titel eines Journals oder einer ZeitschriftJ. Appl. Phys.
VerlagAmerican Institute of Physics (AIP)
Band98
SeitenbereichS. 113517
Datum2005
Veröffentlichungsdatum05 Mrz 2013 07:24
InstitutionenPhysik > Institut für Experimentelle und Angewandte Physik > Lehrstuhl Professor Huber > Arbeitsgruppe Dominique Bougeard
Identifikationsnummer
WertTyp
10.1063/1.2140078DOI
Dewey-Dezimal-Klassifikation500 Naturwissenschaften und Mathematik > 530 Physik
StatusVeröffentlicht
BegutachtetJa, diese Version wurde begutachtet
An der Universität Regensburg entstandenNein
URN der UB Regensburgurn:nbn:de:bvb:355-epub-277920
Dokumenten-ID27792

Bibliographische Daten exportieren

Nur für Besitzer und Autoren: Kontrollseite des Eintrags

nach oben