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Müller, Knut ; Ryll, Henning ; Ordavo, Ivan ; Ihle, Sebastian ; Strüder, Lothar ; Volz, Kerstin ; Zweck, Josef ; ;

Scanning transmission electron microscopy strain measurement from millisecond frames of a direct electron charge coupled device

Müller, Knut, Ryll, Henning, Ordavo, Ivan, Ihle, Sebastian, Strüder, Lothar, Volz, Kerstin, Zweck, Josef, make_name_string expected hash reference and make_name_string expected hash reference (2012) Scanning transmission electron microscopy strain measurement from millisecond frames of a direct electron charge coupled device. Applied Physics Letters 101, p. 212110.

Date of publication of this fulltext: 24 Oct 2016 14:12
Article
DOI to cite this document: 10.5283/epub.34759


Abstract

A high-speed direct electron detection system is introduced to the field of transmission electron microscopy and applied to strain measurements in semiconductor nanostructures. In particular, a focused electron probe with a diameter of 0.5 nm was scanned over a fourfold quantum layer stack with alternating compressive and tensile strain and diffracted discs have been recorded on a ...

A high-speed direct electron detection system is introduced to the field of transmission electron microscopy and applied to strain measurements in semiconductor nanostructures. In particular, a focused electron probe with a diameter of 0.5 nm was scanned over a fourfold quantum layer stack with alternating compressive and tensile strain and diffracted discs have been recorded on a scintillator-free direct electron detector with a frame time of 1 ms. We show that the applied algorithms can accurately detect Bragg beam positions despite a significant point spread each 300 kV electron causes during detection on the scintillator-free camera. For millisecond exposures, we find that strain can be measured with a precision of 1: 3 x 10(-3), enabling, e. g., strain mapping in a 100 x 100 nm(2) region with 0.5 nm resolution in 40 s. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4767655]



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Details

Item typeArticle
Journal or Publication TitleApplied Physics Letters
Publisher:AMER INST PHYSICS
Place of Publication:MELVILLE
Volume:101
Page Range:p. 212110
Date2012
InstitutionsPhysics > Institute of Experimental and Applied Physics > Alumni or Retired Professors > Chair Professor Back > Group Josef Zweck
Identification Number
ValueType
10.1063/1.4767655DOI
KeywordsDETECTOR; HETEROSTRUCTURES; MOBILITY; STRESS;
Dewey Decimal Classification500 Science > 530 Physics
StatusPublished
RefereedYes, this version has been refereed
Created at the University of RegensburgYes
URN of the UB Regensburgurn:nbn:de:bvb:355-epub-347593
Item ID34759

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