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Scanning transmission electron microscopy strain measurement from millisecond frames of a direct electron charge coupled device
Müller, Knut, Ryll, Henning, Ordavo, Ivan, Ihle, Sebastian, Strüder, Lothar, Volz, Kerstin, Zweck, Josef, make_name_string expected hash reference und make_name_string expected hash reference
(2012)
Scanning transmission electron microscopy strain measurement from millisecond frames of a direct electron charge coupled device.
Applied Physics Letters 101, S. 212110.
Veröffentlichungsdatum dieses Volltextes: 24 Okt 2016 14:12
Artikel
DOI zum Zitieren dieses Dokuments: 10.5283/epub.34759
Zusammenfassung
A high-speed direct electron detection system is introduced to the field of transmission electron microscopy and applied to strain measurements in semiconductor nanostructures. In particular, a focused electron probe with a diameter of 0.5 nm was scanned over a fourfold quantum layer stack with alternating compressive and tensile strain and diffracted discs have been recorded on a ...
A high-speed direct electron detection system is introduced to the field of transmission electron microscopy and applied to strain measurements in semiconductor nanostructures. In particular, a focused electron probe with a diameter of 0.5 nm was scanned over a fourfold quantum layer stack with alternating compressive and tensile strain and diffracted discs have been recorded on a scintillator-free direct electron detector with a frame time of 1 ms. We show that the applied algorithms can accurately detect Bragg beam positions despite a significant point spread each 300 kV electron causes during detection on the scintillator-free camera. For millisecond exposures, we find that strain can be measured with a precision of 1: 3 x 10(-3), enabling, e. g., strain mapping in a 100 x 100 nm(2) region with 0.5 nm resolution in 40 s. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4767655]
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| Dokumentenart | Artikel | ||||
| Titel eines Journals oder einer Zeitschrift | Applied Physics Letters | ||||
| Verlag: | AMER INST PHYSICS | ||||
|---|---|---|---|---|---|
| Ort der Veröffentlichung: | MELVILLE | ||||
| Band: | 101 | ||||
| Seitenbereich: | S. 212110 | ||||
| Datum | 2012 | ||||
| Institutionen | Physik > Institut für Experimentelle und Angewandte Physik > Entpflichtete oder im Ruhestand befindliche Professoren > Lehrstuhl Professor Back > Arbeitsgruppe Josef Zweck | ||||
| Identifikationsnummer |
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| Stichwörter / Keywords | DETECTOR; HETEROSTRUCTURES; MOBILITY; STRESS; | ||||
| Dewey-Dezimal-Klassifikation | 500 Naturwissenschaften und Mathematik > 530 Physik | ||||
| Status | Veröffentlicht | ||||
| Begutachtet | Ja, diese Version wurde begutachtet | ||||
| An der Universität Regensburg entstanden | Ja | ||||
| URN der UB Regensburg | urn:nbn:de:bvb:355-epub-347593 | ||||
| Dokumenten-ID | 34759 |
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