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Müller, Knut ; Ryll, Henning ; Ordavo, Ivan ; Ihle, Sebastian ; Strüder, Lothar ; Volz, Kerstin ; Zweck, Josef ; ;

Scanning transmission electron microscopy strain measurement from millisecond frames of a direct electron charge coupled device

Müller, Knut, Ryll, Henning, Ordavo, Ivan, Ihle, Sebastian, Strüder, Lothar, Volz, Kerstin, Zweck, Josef, make_name_string expected hash reference und make_name_string expected hash reference (2012) Scanning transmission electron microscopy strain measurement from millisecond frames of a direct electron charge coupled device. Applied Physics Letters 101, S. 212110.

Veröffentlichungsdatum dieses Volltextes: 24 Okt 2016 14:12
Artikel
DOI zum Zitieren dieses Dokuments: 10.5283/epub.34759


Zusammenfassung

A high-speed direct electron detection system is introduced to the field of transmission electron microscopy and applied to strain measurements in semiconductor nanostructures. In particular, a focused electron probe with a diameter of 0.5 nm was scanned over a fourfold quantum layer stack with alternating compressive and tensile strain and diffracted discs have been recorded on a ...

A high-speed direct electron detection system is introduced to the field of transmission electron microscopy and applied to strain measurements in semiconductor nanostructures. In particular, a focused electron probe with a diameter of 0.5 nm was scanned over a fourfold quantum layer stack with alternating compressive and tensile strain and diffracted discs have been recorded on a scintillator-free direct electron detector with a frame time of 1 ms. We show that the applied algorithms can accurately detect Bragg beam positions despite a significant point spread each 300 kV electron causes during detection on the scintillator-free camera. For millisecond exposures, we find that strain can be measured with a precision of 1: 3 x 10(-3), enabling, e. g., strain mapping in a 100 x 100 nm(2) region with 0.5 nm resolution in 40 s. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4767655]



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Details

DokumentenartArtikel
Titel eines Journals oder einer ZeitschriftApplied Physics Letters
Verlag:AMER INST PHYSICS
Ort der Veröffentlichung:MELVILLE
Band:101
Seitenbereich:S. 212110
Datum2012
InstitutionenPhysik > Institut für Experimentelle und Angewandte Physik > Entpflichtete oder im Ruhestand befindliche Professoren > Lehrstuhl Professor Back > Arbeitsgruppe Josef Zweck
Identifikationsnummer
WertTyp
10.1063/1.4767655DOI
Stichwörter / KeywordsDETECTOR; HETEROSTRUCTURES; MOBILITY; STRESS;
Dewey-Dezimal-Klassifikation500 Naturwissenschaften und Mathematik > 530 Physik
StatusVeröffentlicht
BegutachtetJa, diese Version wurde begutachtet
An der Universität Regensburg entstandenJa
URN der UB Regensburgurn:nbn:de:bvb:355-epub-347593
Dokumenten-ID34759

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