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Scanning transmission electron microscopy strain measurement from millisecond frames of a direct electron charge coupled device
Müller, Knut, Ryll, Henning, Ordavo, Ivan, Ihle, Sebastian, Strüder, Lothar, Volz, Kerstin, Zweck, Josef, make_name_string expected hash reference and make_name_string expected hash reference
(2012)
Scanning transmission electron microscopy strain measurement from millisecond frames of a direct electron charge coupled device.
Applied Physics Letters 101, p. 212110.
Date of publication of this fulltext: 24 Oct 2016 14:12
Article
DOI to cite this document: 10.5283/epub.34759
Abstract
A high-speed direct electron detection system is introduced to the field of transmission electron microscopy and applied to strain measurements in semiconductor nanostructures. In particular, a focused electron probe with a diameter of 0.5 nm was scanned over a fourfold quantum layer stack with alternating compressive and tensile strain and diffracted discs have been recorded on a ...
A high-speed direct electron detection system is introduced to the field of transmission electron microscopy and applied to strain measurements in semiconductor nanostructures. In particular, a focused electron probe with a diameter of 0.5 nm was scanned over a fourfold quantum layer stack with alternating compressive and tensile strain and diffracted discs have been recorded on a scintillator-free direct electron detector with a frame time of 1 ms. We show that the applied algorithms can accurately detect Bragg beam positions despite a significant point spread each 300 kV electron causes during detection on the scintillator-free camera. For millisecond exposures, we find that strain can be measured with a precision of 1: 3 x 10(-3), enabling, e. g., strain mapping in a 100 x 100 nm(2) region with 0.5 nm resolution in 40 s. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4767655]
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| Item type | Article | ||||
| Journal or Publication Title | Applied Physics Letters | ||||
| Publisher: | AMER INST PHYSICS | ||||
|---|---|---|---|---|---|
| Place of Publication: | MELVILLE | ||||
| Volume: | 101 | ||||
| Page Range: | p. 212110 | ||||
| Date | 2012 | ||||
| Institutions | Physics > Institute of Experimental and Applied Physics > Alumni or Retired Professors > Chair Professor Back > Group Josef Zweck | ||||
| Identification Number |
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| Keywords | DETECTOR; HETEROSTRUCTURES; MOBILITY; STRESS; | ||||
| Dewey Decimal Classification | 500 Science > 530 Physics | ||||
| Status | Published | ||||
| Refereed | Yes, this version has been refereed | ||||
| Created at the University of Regensburg | Yes | ||||
| URN of the UB Regensburg | urn:nbn:de:bvb:355-epub-347593 | ||||
| Item ID | 34759 |
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