Direkt zum Inhalt

Kirschbaum, Jochen ; Teuber, T. ; Donner, A. ; Radek, M. ; Bougeard, Dominique ; Böttger, R. ; Lundsgaard Hansen, J. ; Nylandsted Larsen, A. ; Posselt, M. ; Bracht, H.

Self-Diffusion in Amorphous Silicon by Local Bond Rearrangements

Kirschbaum, Jochen, Teuber, T., Donner, A., Radek, M., Bougeard, Dominique, Böttger, R., Lundsgaard Hansen, J., Nylandsted Larsen, A., Posselt, M. and Bracht, H. (2018) Self-Diffusion in Amorphous Silicon by Local Bond Rearrangements. Physical Review Letters 120, p. 225902.

Date of publication of this fulltext: 11 Jun 2018 11:19
Article
DOI to cite this document: 10.5283/epub.37384


Abstract

Experiments on self-diffusion in amorphous silicon (Si) were performed at temperatures between 460 to 600 degrees C. The amorphous structure was prepared by Si ion implantation of single crystalline Si isotope multilayers epitaxially grown on a silicon-on-insulator wafer. The Si isotope profiles before and after annealing were determined by means of secondary ion mass spectrometry. Isothermal ...

Experiments on self-diffusion in amorphous silicon (Si) were performed at temperatures between 460 to 600 degrees C. The amorphous structure was prepared by Si ion implantation of single crystalline Si isotope multilayers epitaxially grown on a silicon-on-insulator wafer. The Si isotope profiles before and after annealing were determined by means of secondary ion mass spectrometry. Isothermal diffusion experiments reveal that structural relaxation does not cause any significant intermixing of the isotope interfaces whereas self-diffusion is significant before the structure recrystallizes. The temperature dependence of selfdiffusion is described by an Arrhenius law with an activation enthalpy Q = (2.70 +/- 0.11) eV and preexponential factor D-0 = (5.5(-37)(+11.1) x 10(-2) cm(2) s(-1)). Remarkably, Q equals the activation enthalpy of hydrogen diffusion in amorphous Si, the migration of bond defects determining boron diffusion, and the activation enthalpy of solid phase epitaxial recrystallization reported in the literature. This close agreement provides strong evidence that self-diffusion is mediated by local bond rearrangements rather than by the migration of extended defects as suggested by Strau beta et al. (Phys. Rev. Lett. 116, 025901 (2016)).



Involved Institutions


Details

Item typeArticle
Journal or Publication TitlePhysical Review Letters
Publisher:AMER PHYSICAL SOC
Place of Publication:COLLEGE PK
Volume:120
Page Range:p. 225902
Date31 May 2018
InstitutionsPhysics > Institute of Experimental and Applied Physics > Chair Professor Huber > Group Dominique Bougeard
Identification Number
ValueType
10.1103/PhysRevLett.120.225902DOI
KeywordsSTRUCTURAL RELAXATION; POINT-DEFECTS; SI; CRYSTALLIZATION; HYDROGEN;
Dewey Decimal Classification500 Science > 530 Physics
StatusPublished
RefereedYes, this version has been refereed
Created at the University of RegensburgPartially
URN of the UB Regensburgurn:nbn:de:bvb:355-epub-373843
Item ID37384

Export bibliographical data

Owner only: item control page

nach oben