Direkt zum Inhalt

Kirschbaum, Jochen ; Teuber, T. ; Donner, A. ; Radek, M. ; Bougeard, Dominique ; Böttger, R. ; Lundsgaard Hansen, J. ; Nylandsted Larsen, A. ; Posselt, M. ; Bracht, H.

Self-Diffusion in Amorphous Silicon by Local Bond Rearrangements

Kirschbaum, Jochen, Teuber, T., Donner, A., Radek, M., Bougeard, Dominique, Böttger, R., Lundsgaard Hansen, J., Nylandsted Larsen, A., Posselt, M. und Bracht, H. (2018) Self-Diffusion in Amorphous Silicon by Local Bond Rearrangements. Physical Review Letters 120, S. 225902.

Veröffentlichungsdatum dieses Volltextes: 11 Jun 2018 11:19
Artikel
DOI zum Zitieren dieses Dokuments: 10.5283/epub.37384


Zusammenfassung

Experiments on self-diffusion in amorphous silicon (Si) were performed at temperatures between 460 to 600 degrees C. The amorphous structure was prepared by Si ion implantation of single crystalline Si isotope multilayers epitaxially grown on a silicon-on-insulator wafer. The Si isotope profiles before and after annealing were determined by means of secondary ion mass spectrometry. Isothermal ...

Experiments on self-diffusion in amorphous silicon (Si) were performed at temperatures between 460 to 600 degrees C. The amorphous structure was prepared by Si ion implantation of single crystalline Si isotope multilayers epitaxially grown on a silicon-on-insulator wafer. The Si isotope profiles before and after annealing were determined by means of secondary ion mass spectrometry. Isothermal diffusion experiments reveal that structural relaxation does not cause any significant intermixing of the isotope interfaces whereas self-diffusion is significant before the structure recrystallizes. The temperature dependence of selfdiffusion is described by an Arrhenius law with an activation enthalpy Q = (2.70 +/- 0.11) eV and preexponential factor D-0 = (5.5(-37)(+11.1) x 10(-2) cm(2) s(-1)). Remarkably, Q equals the activation enthalpy of hydrogen diffusion in amorphous Si, the migration of bond defects determining boron diffusion, and the activation enthalpy of solid phase epitaxial recrystallization reported in the literature. This close agreement provides strong evidence that self-diffusion is mediated by local bond rearrangements rather than by the migration of extended defects as suggested by Strau beta et al. (Phys. Rev. Lett. 116, 025901 (2016)).



Beteiligte Einrichtungen


Details

DokumentenartArtikel
Titel eines Journals oder einer ZeitschriftPhysical Review Letters
Verlag:AMER PHYSICAL SOC
Ort der Veröffentlichung:COLLEGE PK
Band:120
Seitenbereich:S. 225902
Datum31 Mai 2018
InstitutionenPhysik > Institut für Experimentelle und Angewandte Physik > Lehrstuhl Professor Huber > Arbeitsgruppe Dominique Bougeard
Identifikationsnummer
WertTyp
10.1103/PhysRevLett.120.225902DOI
Stichwörter / KeywordsSTRUCTURAL RELAXATION; POINT-DEFECTS; SI; CRYSTALLIZATION; HYDROGEN;
Dewey-Dezimal-Klassifikation500 Naturwissenschaften und Mathematik > 530 Physik
StatusVeröffentlicht
BegutachtetJa, diese Version wurde begutachtet
An der Universität Regensburg entstandenZum Teil
URN der UB Regensburgurn:nbn:de:bvb:355-epub-373843
Dokumenten-ID37384

Bibliographische Daten exportieren

Nur für Besitzer und Autoren: Kontrollseite des Eintrags

nach oben