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Development and application of a multipurpose electrodeposition cell configuration for studying plating processes on wafer specimen and for characterizing surface films by scanning electrochemical microscopy

Hanekamp, Patrick ; Robl, Werner ; Matysik, Frank-Michael



Abstract

In this report, a versatile experimental concept for electrochemical deposition and subsequent surface characterization studies is presented. This concept can be utilized to perform semiconductor plating processes at laboratory scale followed by scanning electrochemical microscopy (SECM). The same sample holder used for electroplating experiments could be integrated into the SECM instrument. ...

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