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On detector linearity and precision of beam shift detection for quantitative differential phase contrast applications

Zweck, Josef ; Schwarzhuber, Felix ; Wild, Johannes ; Galioit, Vincent


Differential phase contrast is a STEM imaging mode where minute sideways deflections of the electron probe are monitored, usually by using a position sensitive device (Chapman, 1984 [1]; Lohr et al., 2012 [2]) or, alternatively in some cases, a fast camera (Muller et al., 2012 [3,4]; Yang et al., 2015 [5]; Pennycook et al., 2015 [6]) as a pixelated detector. While traditionally differential phase ...


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