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Improvement of structural properties of Si/Ge superlattices

Eberl, Karl, Friess, H., Wegscheider, Werner, Menczigar, U. and Abstreiter, Gerhard (1989) Improvement of structural properties of Si/Ge superlattices. Thin Solid Films 183 (1-2), pp. 95-103.

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Short-period Si/Ge strained-layer superlattices are grown by molecular beam epitaxy (MBE) on Si(100) and Ge(100) substrates. Low-energy electron diffraction and Auger electron spectroscopy are performed between growth intervals, to obtain structural and compositional information. Raman spectroscopy and transmission electron microscopy are used for ex-situ characterization. Different buffer ...


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Item type:Article
Date:30 December 1989
Institutions:Physics > Institute of Experimental and Applied Physics > Alumni or Retired Professors > Group Werner Wegscheider
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Dewey Decimal Classification:500 Science > 530 Physics
Created at the University of Regensburg:Unknown
Item ID:9978
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