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Comparison of force sensors for atomic force microscopy based on quartz tuning forks and length-extensional resonators

URN to cite this document:
urn:nbn:de:bvb:355-epub-252686
Giessibl, Franz J. ; Pielmeier, Florian ; Eguchi, Toyoaki ; An, Toshu ; Hasegawa, Yukio
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Date of publication of this fulltext: 05 Jul 2012 06:10


Abstract

The force sensor is key to the performance of atomic force microscopy (AFM). Nowadays, most atomic force microscopes use micromachined force sensors made from silicon, but piezoelectric quartz sensors are being applied at an increasing rate, mainly in vacuum. These self-sensing force sensors allow a relatively easy upgrade of a scanning tunneling microscope to a combined scanning tunneling/atomic ...

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