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Anisotropy and Mechanistic Elucidation of Wet-Chemical Gallium Nitride Etching at the Atomic Level
Tautz, Markus, Weimar, Andreasa, Graßl, Christian, Diaz Diaz, David und make_name_string expected hash reference
(2020)
Anisotropy and Mechanistic Elucidation of Wet-Chemical Gallium Nitride Etching at the Atomic Level.
ChemPlusChem 217, S. 2000221.
Veröffentlichungsdatum dieses Volltextes: 27 Jan 2021 12:58
Artikel
DOI zum Zitieren dieses Dokuments: 10.5283/epub.44632
Zusammenfassung
Etching of gallium nitride is a key step in the production of blue and white light-emitting diodes (LEDs). Etching in aqueous KOH solution creates a rough surface on the LED chip to facilitate outcoupling of the photons generated, drastically increasing the resulting LED's efficiency. Compared with the common technique of dry etching, wet-chemical etching using aqueous KOH solution has ...
Etching of gallium nitride is a key step in the production of blue and white light-emitting diodes (LEDs). Etching in aqueous KOH solution creates a rough surface on the LED chip to facilitate outcoupling of the photons generated, drastically increasing the resulting LED's efficiency. Compared with the common technique of dry etching, wet-chemical etching using aqueous KOH solution has significant advantages, e.g., lower complexity and cost and less remaining surface damage. An in-depth analysis of the molecular etch reaction by characterization of the reaction products is reported. The mechanism identified explains the cause of anisotropic etching, which leads to the formation of hexagonal pyramids. The concept of hydroxide repulsion by protruding NH and NH(2)groups established in the literature is adapted and further developed. The susceptibility of several polar, semipolar, and nonpolar crystal facets may also be explained, as well as the commonly observed increase in average pyramid size over etch time.
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| Dokumentenart | Artikel | ||||
| Titel eines Journals oder einer Zeitschrift | ChemPlusChem | ||||
| Verlag: | Wiley | ||||
|---|---|---|---|---|---|
| Ort der Veröffentlichung: | WEINHEIM | ||||
| Band: | 217 | ||||
| Seitenbereich: | S. 2000221 | ||||
| Datum | 2020 | ||||
| Institutionen | Chemie und Pharmazie > Institut für Organische Chemie Chemie und Pharmazie > Institut für Organische Chemie > Arbeitskreis Prof. Dr. David Díaz Díaz | ||||
| Identifikationsnummer |
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| Stichwörter / Keywords | LIGHT-EMITTING-DIODES; INGAN BLUE; GAN; PITS; PYRAMIDS; POLAR; anisotropy; etching; gallium nitride; light-emitting diodes; mechanism | ||||
| Dewey-Dezimal-Klassifikation | 500 Naturwissenschaften und Mathematik > 540 Chemie | ||||
| Status | Veröffentlicht | ||||
| Begutachtet | Ja, diese Version wurde begutachtet | ||||
| An der Universität Regensburg entstanden | Ja | ||||
| URN der UB Regensburg | urn:nbn:de:bvb:355-epub-446320 | ||||
| Dokumenten-ID | 44632 |
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