Ion beam deposition of fluorinated amorphous carbon
Article
Ronning, C.
, Büttner, M., Vetter, U., Feldermann, H., Wondratschek, O., Hofsäss, H., Brunner, W., Au, Frederick C. K., Li, Quan and Lee, S. T.
(2001)
Ion beam deposition of fluorinated amorphous carbon.
Journal of Applied Physics 90 (8), pp. 4237-4245.
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| Item type | Article | ||||
| Journal or Publication Title | Journal of Applied Physics | ||||
| Publisher | AMER INST PHYSICS | ||||
| Place of Publication | MELVILLE | ||||
| Volume | 90 | ||||
| Number of Issue or Book Chapter | 8 | ||||
| Page Range | pp. 4237-4245 | ||||
| Date | 2001 | ||||
| Date of publication | 19 Dec 2024 15:49 | ||||
| Institutions | Physics > Institute of Experimental and Applied Physics | ||||
| Identification Number |
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| Keywords | LOW-DIELECTRIC-CONSTANT; DIAMOND-LIKE-CARBON; CHEMICAL-VAPOR-DEPOSITION; THIN-FILMS; INTERLAYER DIELECTRICS; THERMAL-STABILITY; HYDROGEN DILUTION; GLOW-DISCHARGE; RAMAN-SPECTRA; TA-C; | ||||
| Dewey Decimal Classification | 500 Science > 530 Physics | ||||
| Status | Published | ||||
| Refereed | Yes, this version has been refereed | ||||
| Created at the University of Regensburg | Yes | ||||
| Item ID | 73403 |
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