Owner only: item control page
Oxide thickness mapping of ultrathin Al2O3 at nanometer scale with conducting atomic force microscopy
Olbrich, Alexander, Ebersberger, Bernd, Boit, Christian, Vancea, Johann, Hoffmann, Horst, Altmann, Hans, Gieres, Guenther and Wecker, Joachim (2001) Oxide thickness mapping of ultrathin Al2O3 at nanometer scale with conducting atomic force microscopy. Applied Physics Letters 78 (19), pp. 2934-2936.Date of publication of this fulltext: 19 Dec 2024 15:51
Article
Alternative links to fulltext
Involved Institutions
Details
| Item type | Article | ||||
| Journal or Publication Title | Applied Physics Letters | ||||
| Publisher: | AMER INST PHYSICS | ||||
|---|---|---|---|---|---|
| Place of Publication: | MELVILLE | ||||
| Volume: | 78 | ||||
| Number of Issue or Book Chapter: | 19 | ||||
| Page Range: | pp. 2934-2936 | ||||
| Date | 2001 | ||||
| Institutions | Physics > Institute of Experimental and Applied Physics | ||||
| Identification Number |
| ||||
| Keywords | ; | ||||
| Dewey Decimal Classification | 500 Science > 530 Physics | ||||
| Status | Published | ||||
| Refereed | Yes, this version has been refereed | ||||
| Created at the University of Regensburg | Yes | ||||
| Item ID | 73664 |
Export bibliographical data
Owner only: item control page
Altmetric
Altmetric