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Nanometer-scale scanning sensors fabricated using stencil lithography
Champagne, A. R., Couture, A. J., Kuemmeth, Ferdinand
and Ralph, D. C.
(2003)
Nanometer-scale scanning sensors fabricated using stencil lithography.
Applied Physics Letters 82 (7), pp. 1111-1113.
Date of publication of this fulltext: 07 Apr 2026 08:48
Article
DOI to cite this document: 10.5283/epub.79092
Abstract
We describe a flexible technique for fabricating 10-nm-scale devices for use as high-resolution scanning sensors and functional probes. Metallic structures are deposited directly onto atomic force microscope tips by evaporation through nanoscale holes fabricated in a stencil mask. We report on the lithographic capabilities of the technique and discuss progress in one initial application, to make high-spatial-resolution magnetic force sensors.
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| Item type | Article | ||||
| Journal or Publication Title | Applied Physics Letters | ||||
| Publisher: | American Institute of Physics (AIP) Publishing | ||||
|---|---|---|---|---|---|
| Volume: | 82 | ||||
| Number of Issue or Book Chapter: | 7 | ||||
| Page Range: | pp. 1111-1113 | ||||
| Date | 17 February 2003 | ||||
| Institutions | Physics > Institute of Experimental and Applied Physics | ||||
| Identification Number |
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| Dewey Decimal Classification | 500 Science > 530 Physics | ||||
| Status | Published | ||||
| Refereed | Yes, this version has been refereed | ||||
| Created at the University of Regensburg | No | ||||
| URN of the UB Regensburg | urn:nbn:de:bvb:355-epub-790921 | ||||
| Item ID | 79092 |
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