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Lüscher, S. ; Fuhrer, A. ; Held, R. ; Heinzel, Thomas ; Ensslin, Klaus ; Bichler, Max ; Wegscheider, Werner

Quantum wires and quantum dots defined by lithography with an atomic force microscope

Lüscher, S., Fuhrer, A., Held, R., Heinzel, Thomas, Ensslin, Klaus, Bichler, Max and Wegscheider, Werner (2002) Quantum wires and quantum dots defined by lithography with an atomic force microscope. Microelectronics Journal 33 (4), pp. 319-321.

Date of publication of this fulltext: 07 Dec 2009 13:19
Article
DOI to cite this document: 10.5283/epub.11312


Abstract

Semiconductor nanostructures are realized by patterning AlGaAs/GaAs heterostructures with an atomic force microscope. Steep potential walls, precise pattern transfer and a combination of in-plane and top gates can be achieved with this technique. The electronic properties of nanostructures defined in this way are discussed on two examples, namely a quantum point contact and a single electron ...

Semiconductor nanostructures are realized by patterning AlGaAs/GaAs heterostructures with an atomic force microscope. Steep potential walls, precise pattern transfer and a combination of in-plane and top gates can be achieved with this technique. The electronic properties of nanostructures defined in this way are discussed on two examples, namely a quantum point contact and a single electron transistor. For the quantum point contact we demonstrate quantized conductance at temperatures of 4 K and above. This indicates the strong confinement energy in this system. For the single electron transistor, the realization of special potential shapes and the observation of high-quality Coulomb blockade is shown.



Involved Institutions


Details

Item typeArticle
Journal or Publication TitleMicroelectronics Journal
Publisher:Elsevier
Volume:33
Number of Issue or Book Chapter:4
Page Range:pp. 319-321
DateApril 2002
InstitutionsPhysics > Institute of Experimental and Applied Physics > Alumni or Retired Professors > Group Werner Wegscheider
Identification Number
ValueType
10.1016/S0026-2692(01)00125-2DOI
KeywordsAtomic force microscope; Nanostructures; Lithography
Dewey Decimal Classification500 Science > 530 Physics
StatusPublished
RefereedUnknown
Created at the University of RegensburgUnknown
Item ID11312

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