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Quantum wires and quantum dots defined by lithography with an atomic force microscope
Lüscher, S., Fuhrer, A., Held, R., Heinzel, Thomas, Ensslin, Klaus, Bichler, Max and Wegscheider, Werner (2002) Quantum wires and quantum dots defined by lithography with an atomic force microscope. Microelectronics Journal 33 (4), pp. 319-321.Date of publication of this fulltext: 07 Dec 2009 13:19
Article
DOI to cite this document: 10.5283/epub.11312
Abstract
Semiconductor nanostructures are realized by patterning AlGaAs/GaAs heterostructures with an atomic force microscope. Steep potential walls, precise pattern transfer and a combination of in-plane and top gates can be achieved with this technique. The electronic properties of nanostructures defined in this way are discussed on two examples, namely a quantum point contact and a single electron ...
Semiconductor nanostructures are realized by patterning AlGaAs/GaAs heterostructures with an atomic force microscope. Steep potential walls, precise pattern transfer and a combination of in-plane and top gates can be achieved with this technique. The electronic properties of nanostructures defined in this way are discussed on two examples, namely a quantum point contact and a single electron transistor. For the quantum point contact we demonstrate quantized conductance at temperatures of 4 K and above. This indicates the strong confinement energy in this system. For the single electron transistor, the realization of special potential shapes and the observation of high-quality Coulomb blockade is shown.
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Details
| Item type | Article | ||||
| Journal or Publication Title | Microelectronics Journal | ||||
| Publisher: | Elsevier | ||||
|---|---|---|---|---|---|
| Volume: | 33 | ||||
| Number of Issue or Book Chapter: | 4 | ||||
| Page Range: | pp. 319-321 | ||||
| Date | April 2002 | ||||
| Institutions | Physics > Institute of Experimental and Applied Physics > Alumni or Retired Professors > Group Werner Wegscheider | ||||
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| Keywords | Atomic force microscope; Nanostructures; Lithography | ||||
| Dewey Decimal Classification | 500 Science > 530 Physics | ||||
| Status | Published | ||||
| Refereed | Unknown | ||||
| Created at the University of Regensburg | Unknown | ||||
| Item ID | 11312 |
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