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Planar Hall sensors for micro-Hall magnetometry
Rahm, Michael, Raabe, Jörg, Pulwey, Ralph, Biberger, Josef, Wegscheider, Werner, Weiss, Dieter und Meier, C. (2002) Planar Hall sensors for micro-Hall magnetometry. Journal of Applied Physics 91 (10), S. 7980.Veröffentlichungsdatum dieses Volltextes: 07 Dez 2009 13:28
Artikel
DOI zum Zitieren dieses Dokuments: 10.5283/epub.11320
Zusammenfassung
In this work we present a new method to fabricate planar Hall sensors from GaAs–AlGaAs heterojunctions, which can be used to examine the local stray field at a specific section of a micron-sized magnet. Instead of mesa etching we implanted oxygen ions with an energy of 1.5 keV which deplete the two-dimensional electron gas underneath the exposed areas but leave the wafer flat. Planar double Hall ...
In this work we present a new method to fabricate planar Hall sensors from GaAs–AlGaAs heterojunctions, which can be used to examine the local stray field at a specific section of a micron-sized magnet. Instead of mesa etching we implanted oxygen ions with an energy of 1.5 keV which deplete the two-dimensional electron gas underneath the exposed areas but leave the wafer flat. Planar double Hall cross devices were employed to investigate 30 nm thick electroplated Ni rings with outer and inner diameters ranging from 1.2 to 2 µm and from 0.3 to 1.6 µm, respectively. By comparing the signals from both Hall crosses of the sensor, we can distinguish between local stray field variations and changes of the global magnetization pattern. A hysteresis loop measured at a temperature of 110 K suggests that magnetization reversal occurs via a magnetic vortex structure.
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| Dokumentenart | Artikel | ||||
| Titel eines Journals oder einer Zeitschrift | Journal of Applied Physics | ||||
| Verlag: | American Institute of Physics | ||||
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| Band: | 91 | ||||
| Nummer des Zeitschriftenheftes oder des Kapitels: | 10 | ||||
| Seitenbereich: | S. 7980 | ||||
| Datum | 15 Mai 2002 | ||||
| Institutionen | Physik > Institut für Experimentelle und Angewandte Physik > Entpflichtete oder im Ruhestand befindliche Professoren > Arbeitsgruppe Werner Wegscheider | ||||
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| Stichwörter / Keywords | gallium arsenide, aluminium compounds, III-V semiconductors, semiconductor heterojunctions, Hall effect, magnetometers, magnetic field measurement, magnetisation reversal, oxygen, ion implantation, two-dimensional electron gas, Hall effect devices, nickel, magnetic particles, ferromagnetic materials | ||||
| Dewey-Dezimal-Klassifikation | 500 Naturwissenschaften und Mathematik > 530 Physik | ||||
| Status | Veröffentlicht | ||||
| Begutachtet | Unbekannt / Keine Angabe | ||||
| An der Universität Regensburg entstanden | Unbekannt / Keine Angabe | ||||
| Dokumenten-ID | 11320 |
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