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Planar Hall sensors for micro-Hall magnetometry
Rahm, Michael, Raabe, Jörg, Pulwey, Ralph, Biberger, Josef, Wegscheider, Werner, Weiss, Dieter and Meier, C. (2002) Planar Hall sensors for micro-Hall magnetometry. Journal of Applied Physics 91 (10), p. 7980.Date of publication of this fulltext: 07 Dec 2009 13:28
Article
DOI to cite this document: 10.5283/epub.11320
Abstract
In this work we present a new method to fabricate planar Hall sensors from GaAs–AlGaAs heterojunctions, which can be used to examine the local stray field at a specific section of a micron-sized magnet. Instead of mesa etching we implanted oxygen ions with an energy of 1.5 keV which deplete the two-dimensional electron gas underneath the exposed areas but leave the wafer flat. Planar double Hall ...
In this work we present a new method to fabricate planar Hall sensors from GaAs–AlGaAs heterojunctions, which can be used to examine the local stray field at a specific section of a micron-sized magnet. Instead of mesa etching we implanted oxygen ions with an energy of 1.5 keV which deplete the two-dimensional electron gas underneath the exposed areas but leave the wafer flat. Planar double Hall cross devices were employed to investigate 30 nm thick electroplated Ni rings with outer and inner diameters ranging from 1.2 to 2 µm and from 0.3 to 1.6 µm, respectively. By comparing the signals from both Hall crosses of the sensor, we can distinguish between local stray field variations and changes of the global magnetization pattern. A hysteresis loop measured at a temperature of 110 K suggests that magnetization reversal occurs via a magnetic vortex structure.
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| Item type | Article | ||||
| Journal or Publication Title | Journal of Applied Physics | ||||
| Publisher: | American Institute of Physics | ||||
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| Volume: | 91 | ||||
| Number of Issue or Book Chapter: | 10 | ||||
| Page Range: | p. 7980 | ||||
| Date | 15 May 2002 | ||||
| Institutions | Physics > Institute of Experimental and Applied Physics > Alumni or Retired Professors > Group Werner Wegscheider | ||||
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| Keywords | gallium arsenide, aluminium compounds, III-V semiconductors, semiconductor heterojunctions, Hall effect, magnetometers, magnetic field measurement, magnetisation reversal, oxygen, ion implantation, two-dimensional electron gas, Hall effect devices, nickel, magnetic particles, ferromagnetic materials | ||||
| Dewey Decimal Classification | 500 Science > 530 Physics | ||||
| Status | Published | ||||
| Refereed | Unknown | ||||
| Created at the University of Regensburg | Unknown | ||||
| Item ID | 11320 |
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