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Ertl, F. ; Asperger, T. ; Deutschmann, R. A. ; Wegscheider, Werner ; Bichler, Max ; Böhm, G. ; Abstreiter, Gerhard

Vertical field effect transistors realized by cleaved-edge overgrowth

Ertl, F., Asperger, T., Deutschmann, R. A., Wegscheider, Werner, Bichler, Max, Böhm, G. and Abstreiter, Gerhard (2002) Vertical field effect transistors realized by cleaved-edge overgrowth. Physica E Low-dimensional Systems and Nanostructures 13 (2-4), pp. 920-924.

Date of publication of this fulltext: 07 Dec 2009 13:29
Article
DOI to cite this document: 10.5283/epub.11324


Abstract

We present a brief survey of vertical transistor devices fabricated by the cleaved-edge overgrowth technique. Different device types are realized using different transistor substrates grown by molecular beam epitaxy. These substrates mainly vary in the layer sequence and thickness between the source/drain contacts. Common to all designs is the vertical gate structure overgrown on a cleavage plane ...

We present a brief survey of vertical transistor devices fabricated by the cleaved-edge overgrowth technique. Different device types are realized using different transistor substrates grown by molecular beam epitaxy. These substrates mainly vary in the layer sequence and thickness between the source/drain contacts. Common to all designs is the vertical gate structure overgrown on a cleavage plane of the substrates. By biasing the gate a two-dimensional electron system of tunable density is induced between source/drain. We study the DC transport properties of long channel (source–drain distance not, vert, similar1 μm) as well as short-channel (source–drain distance not, vert, similar50 nm) devices. Also the choice of the source/drain isolation (a superlattice or a p+-δ-doping or a heterobarrier) affects the characteristic device behavior.



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Details

Item typeArticle
Journal or Publication TitlePhysica E Low-dimensional Systems and Nanostructures
Publisher:Elsevier
Volume:13
Number of Issue or Book Chapter:2-4
Page Range:pp. 920-924
DateMarch 2002
InstitutionsPhysics > Institute of Experimental and Applied Physics > Alumni or Retired Professors > Group Werner Wegscheider
Identification Number
ValueType
10.1016/S1386-9477(02)00235-7DOI
Classification
NotationType
81.16.−c; 85.35.−p; 73.63.−bPACS
KeywordsCleaved-edge overgrowth; Vertical transistor; DC transport
Dewey Decimal Classification500 Science > 530 Physics
StatusPublished
RefereedUnknown
Created at the University of RegensburgUnknown
Item ID11324

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