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Vertical field effect transistors realized by cleaved-edge overgrowth
Ertl, F., Asperger, T., Deutschmann, R. A., Wegscheider, Werner, Bichler, Max, Böhm, G. and Abstreiter, Gerhard (2002) Vertical field effect transistors realized by cleaved-edge overgrowth. Physica E Low-dimensional Systems and Nanostructures 13 (2-4), pp. 920-924.Date of publication of this fulltext: 07 Dec 2009 13:29
Article
DOI to cite this document: 10.5283/epub.11324
Abstract
We present a brief survey of vertical transistor devices fabricated by the cleaved-edge overgrowth technique. Different device types are realized using different transistor substrates grown by molecular beam epitaxy. These substrates mainly vary in the layer sequence and thickness between the source/drain contacts. Common to all designs is the vertical gate structure overgrown on a cleavage plane ...
We present a brief survey of vertical transistor devices fabricated by the cleaved-edge overgrowth technique. Different device types are realized using different transistor substrates grown by molecular beam epitaxy. These substrates mainly vary in the layer sequence and thickness between the source/drain contacts. Common to all designs is the vertical gate structure overgrown on a cleavage plane of the substrates. By biasing the gate a two-dimensional electron system of tunable density is induced between source/drain. We study the DC transport properties of long channel (source–drain distance not, vert, similar1 μm) as well as short-channel (source–drain distance not, vert, similar50 nm) devices. Also the choice of the source/drain isolation (a superlattice or a p+-δ-doping or a heterobarrier) affects the characteristic device behavior.
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| Item type | Article | ||||
| Journal or Publication Title | Physica E Low-dimensional Systems and Nanostructures | ||||
| Publisher: | Elsevier | ||||
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| Volume: | 13 | ||||
| Number of Issue or Book Chapter: | 2-4 | ||||
| Page Range: | pp. 920-924 | ||||
| Date | March 2002 | ||||
| Institutions | Physics > Institute of Experimental and Applied Physics > Alumni or Retired Professors > Group Werner Wegscheider | ||||
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| Keywords | Cleaved-edge overgrowth; Vertical transistor; DC transport | ||||
| Dewey Decimal Classification | 500 Science > 530 Physics | ||||
| Status | Published | ||||
| Refereed | Unknown | ||||
| Created at the University of Regensburg | Unknown | ||||
| Item ID | 11324 |
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