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Vertical field effect transistors realized by cleaved-edge overgrowth
Ertl, F., Asperger, T., Deutschmann, R. A., Wegscheider, Werner, Bichler, Max, Böhm, G. und Abstreiter, Gerhard (2002) Vertical field effect transistors realized by cleaved-edge overgrowth. Physica E Low-dimensional Systems and Nanostructures 13 (2-4), S. 920-924.Veröffentlichungsdatum dieses Volltextes: 07 Dez 2009 13:29
Artikel
DOI zum Zitieren dieses Dokuments: 10.5283/epub.11324
Zusammenfassung
We present a brief survey of vertical transistor devices fabricated by the cleaved-edge overgrowth technique. Different device types are realized using different transistor substrates grown by molecular beam epitaxy. These substrates mainly vary in the layer sequence and thickness between the source/drain contacts. Common to all designs is the vertical gate structure overgrown on a cleavage plane ...
We present a brief survey of vertical transistor devices fabricated by the cleaved-edge overgrowth technique. Different device types are realized using different transistor substrates grown by molecular beam epitaxy. These substrates mainly vary in the layer sequence and thickness between the source/drain contacts. Common to all designs is the vertical gate structure overgrown on a cleavage plane of the substrates. By biasing the gate a two-dimensional electron system of tunable density is induced between source/drain. We study the DC transport properties of long channel (source–drain distance not, vert, similar1 μm) as well as short-channel (source–drain distance not, vert, similar50 nm) devices. Also the choice of the source/drain isolation (a superlattice or a p+-δ-doping or a heterobarrier) affects the characteristic device behavior.
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| Dokumentenart | Artikel | ||||
| Titel eines Journals oder einer Zeitschrift | Physica E Low-dimensional Systems and Nanostructures | ||||
| Verlag: | Elsevier | ||||
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| Band: | 13 | ||||
| Nummer des Zeitschriftenheftes oder des Kapitels: | 2-4 | ||||
| Seitenbereich: | S. 920-924 | ||||
| Datum | März 2002 | ||||
| Institutionen | Physik > Institut für Experimentelle und Angewandte Physik > Entpflichtete oder im Ruhestand befindliche Professoren > Arbeitsgruppe Werner Wegscheider | ||||
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| Klassifikation |
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| Stichwörter / Keywords | Cleaved-edge overgrowth; Vertical transistor; DC transport | ||||
| Dewey-Dezimal-Klassifikation | 500 Naturwissenschaften und Mathematik > 530 Physik | ||||
| Status | Veröffentlicht | ||||
| Begutachtet | Unbekannt / Keine Angabe | ||||
| An der Universität Regensburg entstanden | Unbekannt / Keine Angabe | ||||
| Dokumenten-ID | 11324 |
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