Mechanical Mixing in Nonlinear Nanomechanical Resonators

Erbe, A., Corso, G., Krommer, H., Tilke, A., Richter, Klaus und Blick, Robert (2000) Mechanical Mixing in Nonlinear Nanomechanical Resonators. Applied Physics Letters 77 (19), S. 3102-3104.

PDF Download (166kB) - Nur für Mitarbeiter des Archivs

Zum Artikel beim Verlag (über DOI)

Zum arXiv-Eintrag dieses Artikels

Andere URL zum Volltext: http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=APPLAB000077000019003102000001&idtype=cvips&gifs=yes

Zusammenfassung

The physics of nonlinear dynamics has been studied in detail in macroscopic mechanical systems like the driven classical pendulum. By now, it is possible to build mechanical devices on the nanometer scale with eigenfrequencies on the order of several 100 MHz. In this work, we want to present how to machine such nanomechanical resonators out of silicon-on-insulator wafers and how to ...

Bibliographische Daten exportieren