Mechanical Mixing in Nonlinear Nanomechanical Resonators

DOI to cite this document:: 10.5283/epub.1460

Erbe, A. ; Corso, G. ; Krommer, H. ; Tilke, A. ; Richter, Klaus ; Blick, Robert

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Date of publication of this fulltext: 05 Aug 2009 13:29

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Abstract

The physics of nonlinear dynamics has been studied in detail in macroscopic mechanical systems like the driven classical pendulum. By now, it is possible to build mechanical devices on the nanometer scale with eigenfrequencies on the order of several 100 MHz. In this work, we want to present how to machine such nanomechanical resonators out of silicon-on-insulator wafers and how to ...