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Neural network models for error classification and manufacturing yield forecast

Schels, A., Leim, D. and Lang, Elmar (2002) Neural network models for error classification and manufacturing yield forecast. In: Proc. of Int. Conf. Modelling and Analysis of Semiconductor Manufacturing (MASM), Tempe, Arizona, 2002. , pp. 296-301.

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Item type:Book section
Date:2002
Institutions:Biology, Preclinical Medicine > Institut für Biophysik und physikalische Biochemie > Prof. Dr. Elmar Lang
Dewey Decimal Classification:500 Science > 570 Life sciences
Status:Published
Refereed:Unknown
Created at the University of Regensburg:Unknown
Item ID:17363
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