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Interstitial-mediated diffusion in germanium under proton irradiation

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Bracht, H. ; Schneider, S. ; Klug, J. N. ; Liao, C. Y. ; Lundsgaard Hansen, J. ; Haller, E. E. ; Nylandsted Larsen, A. ; Bougeard, Dominique ; Posselt, M. ; Wündisch, C.
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Date of publication of this fulltext: 27 Feb 2013 13:56


We report experiments on the impact of 2.5 MeV proton irradiation on self-diffusion and dopant diffusion in germanium (Ge). Self-diffusion under irradiation reveals an unusual depth independent broadening of the Ge isotope multilayer structure. This behavior and the observed enhanced diffusion of B and retarded diffusion of P demonstrates that an interstitial-mediated diffusion process dominates ...


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