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Radiation-enhanced self- and boron diffusion in germanium

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Schneider, S. ; Bracht, H. ; Klug, J. N. ; Lundsgaard, H. ; Nylandsted Larsen, A. ; Bougeard, Dominique ; Haller, E. E.
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Date of publication of this fulltext: 22 Apr 2013 12:17


We report experiments on proton radiation-enhanced self- and boron (B) diffusion in germanium (Ge) for temperatures between 515 ∘C and 720 ∘C. Modeling of the experimental diffusion profiles measured by means of secondary ion mass spectrometry is achieved on the basis of the Frenkel pair reaction and the interstitialcy and dissociative diffusion mechanisms. The numerical simulations ascertain ...


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