Defect generation by nitrogen during pulsed sputter deposition of GaN
Steib, Frederik, Remmele, Thilo, Gülink, Jan, Fündling, Sönke, Behres, Alexander, Wehmann, Hergo-Heinrich, Albrecht, Martin, Straßburg, Martin, Lugauer, Hans-Jürgen and Waag, Andreas (2018) Defect generation by nitrogen during pulsed sputter deposition of GaN. Journal of Applied Physics 124 (17), p. 175701.Date of publication of this fulltext: 28 Jul 2021 16:58
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| Item type | Article | ||||
| Journal or Publication Title | Journal of Applied Physics | ||||
| Volume: | 124 | ||||
|---|---|---|---|---|---|
| Number of Issue or Book Chapter: | 17 | ||||
| Page Range: | p. 175701 | ||||
| Date | 2018 | ||||
| Institutions | UNSPECIFIED | ||||
| Identification Number |
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| Dewey Decimal Classification | UNSPECIFIED | ||||
| Status | Published | ||||
| Refereed | Yes, this version has been refereed | ||||
| Created at the University of Regensburg | Yes | ||||
| Item ID | 46606 |
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