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Influence of sample preparation on intrinsic stresses inside a model Chip - First results of partial decapsulation

Schaffus, T. ; Albert, P. ; Breuer, W. ; Debie, D. ; Graml, M. ; Hollerith, C. ; Kroninger, F. ; Mack, W. ; Pfaff, H. ; Schaffus, M. ; Walter, J.



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