| Item type: | Article | ||||
|---|---|---|---|---|---|
| Journal or Publication Title: | Journal of Vacuum Science & Technology B | ||||
| Volume: | 36 | ||||
| Number of Issue or Book Chapter: | 5 | ||||
| Page Range: | 051805 | ||||
| Date: | 2018 | ||||
| Institutions: | UNSPECIFIED | ||||
| Identification Number: |
| ||||
| Dewey Decimal Classification: | UNSPECIFIED | ||||
| Status: | Published | ||||
| Refereed: | Yes, this version has been refereed | ||||
| Created at the University of Regensburg: | Yes | ||||
| Item ID: | 46839 |
Metadata last modified: 29 Sep 2021 07:42
Owner only: item control page
Altmetric
Altmetric