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Material contrast studies of conductive thin films on semiconductor substrates using scanning electrochemical microscopy

Hanekamp, Patrick ; Raith, Timo ; Iffelsberger, Christian ; Zankl, Tobias ; Robl, Werner ; Matysik, Frank-Michael



Abstract

In this paper, a mediator-free scanning electrochemical microscopy (SECM) imaging concept is presented, which is capable of generating high electrochemical contrast and high spatial resolution between two conductive materials. The methodical approach is based on the hydrogen evolution reaction which shows potential dependent material selectivity. Various conductive thin films deposited on silicon ...

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