Material contrast studies of conductive thin films on semiconductor substrates using scanning electrochemical microscopy
Hanekamp, Patrick, Raith, Timo, Iffelsberger, Christian, Zankl, Tobias, Robl, Werner and Matysik, Frank-Michael
(2019)
Material contrast studies of conductive thin films on semiconductor substrates using scanning electrochemical microscopy.
Journal of Applied Electrochemistry 49 (5), pp. 455-463.
Date of publication of this fulltext: 03 Sep 2021 10:02
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| Item type | Article | ||||
| Journal or Publication Title | Journal of Applied Electrochemistry | ||||
| Publisher: | Springer | ||||
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| Place of Publication: | DORDRECHT | ||||
| Volume: | 49 | ||||
| Number of Issue or Book Chapter: | 5 | ||||
| Page Range: | pp. 455-463 | ||||
| Date | 2019 | ||||
| Institutions | Chemistry and Pharmacy > Institut für Analytische Chemie, Chemo- und Biosensorik Chemistry and Pharmacy > Institut für Analytische Chemie, Chemo- und Biosensorik > Instrumentelle Analytik (Prof. Frank-Michael Matysik) | ||||
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| Keywords | DIRECT COPPER ELECTRODEPOSITION; LINER MATERIALS; NUCLEATION; DEPOSITION; BARRIERS; GROWTH; LAYERS; TAN; Scanning electrochemical microscopy; Hydrogen evolution reaction; Thin film metals; Substrate generation-tip collection mode | ||||
| Dewey Decimal Classification | 500 Science > 540 Chemistry & allied sciences | ||||
| Status | Published | ||||
| Refereed | Yes, this version has been refereed | ||||
| Created at the University of Regensburg | Yes | ||||
| Item ID | 48738 |
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