We calculate the soft function using lattice QCD in the framework of large momentum effective theory incorporating the one-loop perturbative contributions. The soft function is a crucial ingredient in the lattice determination of light cone objects using transverse-momentum-dependent (TMD) factorization. It consists of a rapidity-independent part called intrinsic soft function and a rapidity-dependent part called Collins-Soper kernel. We have adopted appropriate normalization when constructing the pseudoscalar meson form factor that is needed in the determination of the intrinsic part and applied Fierz rearrangement to suppress the higher-twist effects. In the calculation of CS kernel we consider a CLS ensemble other than the MILC ensemble used in a previous study. We have also compared the applicability of determining the CS kernel using quasi TMDWFs and quasi TMDPDFs. As an example, the determined soft function is used to obtain the physical TMD wave functions (WFs) of pion and unpolarized iso-vector TMD parton distribution functions (PDFs) of proton.