Ni reactions with surfaces: dependence of gettering efficiencies for Ni on crystal-growth conditions, back-side-gettering techniques, oxygen precipitates and thermal treatments
Hölzl, R., Fabry, L. and Range, K.-J. (2002) Ni reactions with surfaces: dependence of gettering efficiencies for Ni on crystal-growth conditions, back-side-gettering techniques, oxygen precipitates and thermal treatments. Applied Physics A: Materials Science & Processing 74 (5), pp. 711-718.Date of publication of this fulltext: 19 Dec 2024 15:43
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| Item type | Article | ||||
| Journal or Publication Title | Applied Physics A: Materials Science & Processing | ||||
| Publisher: | SPRINGER-VERLAG | ||||
|---|---|---|---|---|---|
| Place of Publication: | NEW YORK | ||||
| Volume: | 74 | ||||
| Number of Issue or Book Chapter: | 5 | ||||
| Page Range: | pp. 711-718 | ||||
| Date | 2002 | ||||
| Institutions | Chemistry and Pharmacy > Institut für Anorganische Chemie | ||||
| Identification Number |
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| Keywords | HELIUM ION-IMPLANTATION; SILICON-WAFERS; MASS-SPECTROMETRY; TRANSITION-METALS; COPPER; CAVITIES; CU; CONTAMINATION; NANOCAVITIES; MECHANISMS; | ||||
| Dewey Decimal Classification | 500 Science > 540 Chemistry & allied sciences | ||||
| Status | Published | ||||
| Refereed | Yes, this version has been refereed | ||||
| Created at the University of Regensburg | Yes | ||||
| Item ID | 72991 |
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