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Scanning Hall Probe Microscopy with Shear Force Distance Control

Schweinböck, T ; Weiss, Dieter ; Lipinski, M ; Eberl, K



Abstract

We describe a new type of scanning Hall probe microscope operating at room temperature for quantitative and noninvasive measurements of magnetic stray fields. The probe-sample distance is controlled by piezoelectrical detection of the shear forces acting on an oscillating cantilever. The Hall probes are manufactured from prepatterned GaAs wafers overgrown with a GaAs/AlGaAs ...

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