Go to content
UR Home

Fabrication of large periodic arrays of AlGaAs microdisks by laser-interference lithography and selective etching

DOI to cite this document:
Petter, K. ; Kipp, T. ; Heitmann, Detlef ; Heyn, Ch. ; Schüller, Christian
(356kB) - Repository staff only
Date of publication of this fulltext: 21 Sep 2009 07:18


By laser-interference lithography, reactive-ion etching, and selective wet-chemical etching using a citric acid-based solution, we have fabricated large periodic arrays of AlGaAs microdisks with periods of 4 µm and disk diameters between 1.5 and 2 µm. The arrays are characterized by temperature-dependent photoluminescence spectroscopy. Taking into account the below-threshold absorption of the ...


Owner only: item control page
  1. Homepage UR

University Library

Publication Server


Publishing: oa@ur.de
0941 943 -4239 or -69394

Dissertations: dissertationen@ur.de
0941 943 -3904

Research data: datahub@ur.de
0941 943 -5707

Contact persons