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Fabrication of large periodic arrays of AlGaAs microdisks by laser-interference lithography and selective etching
Petter, K., Kipp, T., Heitmann, Detlef, Heyn, Ch. und Schüller, Christian (2002) Fabrication of large periodic arrays of AlGaAs microdisks by laser-interference lithography and selective etching. Applied Physics Letters 81 (4; 3 S), S. 592.Veröffentlichungsdatum dieses Volltextes: 21 Sep 2009 07:18
Artikel
DOI zum Zitieren dieses Dokuments: 10.5283/epub.9497
Zusammenfassung
By laser-interference lithography, reactive-ion etching, and selective wet-chemical etching using a citric acid-based solution, we have fabricated large periodic arrays of AlGaAs microdisks with periods of 4 µm and disk diameters between 1.5 and 2 µm. The arrays are characterized by temperature-dependent photoluminescence spectroscopy. Taking into account the below-threshold absorption of the ...
By laser-interference lithography, reactive-ion etching, and selective wet-chemical etching using a citric acid-based solution, we have fabricated large periodic arrays of AlGaAs microdisks with periods of 4 µm and disk diameters between 1.5 and 2 µm. The arrays are characterized by temperature-dependent photoluminescence spectroscopy. Taking into account the below-threshold absorption of the quantum wells inside the disks, we get disk quality factors close to the theoretical maximum value. We demonstrate that our technique allows one also to produce one-dimensionally or two-dimensionally coupled arrays of microdisks.
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| Dokumentenart | Artikel | ||||
| Titel eines Journals oder einer Zeitschrift | Applied Physics Letters | ||||
| Verlag: | American Institute of Physics | ||||
|---|---|---|---|---|---|
| Band: | 81 | ||||
| Nummer des Zeitschriftenheftes oder des Kapitels: | 4; 3 S | ||||
| Seitenbereich: | S. 592 | ||||
| Datum | 24 Mai 2002 | ||||
| Institutionen | Physik > Institut für Experimentelle und Angewandte Physik > Lehrstuhl Professor Lupton > Arbeitsgruppe Christian Schüller | ||||
| Identifikationsnummer |
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| Dewey-Dezimal-Klassifikation | 500 Naturwissenschaften und Mathematik > 530 Physik | ||||
| Status | Veröffentlicht | ||||
| Begutachtet | Unbekannt / Keine Angabe | ||||
| An der Universität Regensburg entstanden | Unbekannt / Keine Angabe | ||||
| Dokumenten-ID | 9497 |
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