Direkt zum Inhalt

Owner only: item control page
Petter, K. ; Kipp, T. ; Heitmann, Detlef ; Heyn, Ch. ; Schüller, Christian

Fabrication of large periodic arrays of AlGaAs microdisks by laser-interference lithography and selective etching

Petter, K., Kipp, T., Heitmann, Detlef, Heyn, Ch. and Schüller, Christian (2002) Fabrication of large periodic arrays of AlGaAs microdisks by laser-interference lithography and selective etching. Applied Physics Letters 81 (4; 3 S), p. 592.

Date of publication of this fulltext: 21 Sep 2009 07:18
Article
DOI to cite this document: 10.5283/epub.9497


Abstract

By laser-interference lithography, reactive-ion etching, and selective wet-chemical etching using a citric acid-based solution, we have fabricated large periodic arrays of AlGaAs microdisks with periods of 4 µm and disk diameters between 1.5 and 2 µm. The arrays are characterized by temperature-dependent photoluminescence spectroscopy. Taking into account the below-threshold absorption of the ...

By laser-interference lithography, reactive-ion etching, and selective wet-chemical etching using a citric acid-based solution, we have fabricated large periodic arrays of AlGaAs microdisks with periods of 4 µm and disk diameters between 1.5 and 2 µm. The arrays are characterized by temperature-dependent photoluminescence spectroscopy. Taking into account the below-threshold absorption of the quantum wells inside the disks, we get disk quality factors close to the theoretical maximum value. We demonstrate that our technique allows one also to produce one-dimensionally or two-dimensionally coupled arrays of microdisks.



Involved Institutions


Details

Item typeArticle
Journal or Publication TitleApplied Physics Letters
Publisher:American Institute of Physics
Volume:81
Number of Issue or Book Chapter:4; 3 S
Page Range:p. 592
Date24 May 2002
InstitutionsPhysics > Institute of Experimental and Applied Physics > Chair Professor Lupton > Group Christian Schüller
Identification Number
ValueType
10.1063/1.1495082DOI
Dewey Decimal Classification500 Science > 530 Physics
StatusPublished
RefereedUnknown
Created at the University of RegensburgUnknown
Item ID9497

Export bibliographical data

Owner only: item control page

nach oben