Fabrication of large periodic arrays of AlGaAs microdisks by laser-interference lithography and selective etching

DOI to cite this document:: 10.5283/epub.9497

Petter, K. ; Kipp, T. ; Heitmann, Detlef ; Heyn, Ch. ; Schüller, Christian

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Date of publication of this fulltext: 21 Sep 2009 07:18

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Abstract

By laser-interference lithography, reactive-ion etching, and selective wet-chemical etching using a citric acid-based solution, we have fabricated large periodic arrays of AlGaAs microdisks with periods of 4 µm and disk diameters between 1.5 and 2 µm. The arrays are characterized by temperature-dependent photoluminescence spectroscopy. Taking into account the below-threshold absorption of the ...