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Fabrication of large periodic arrays of AlGaAs microdisks by laser-interference lithography and selective etching
Petter, K., Kipp, T., Heitmann, Detlef, Heyn, Ch. and Schüller, Christian (2002) Fabrication of large periodic arrays of AlGaAs microdisks by laser-interference lithography and selective etching. Applied Physics Letters 81 (4; 3 S), p. 592.Date of publication of this fulltext: 21 Sep 2009 07:18
Article
DOI to cite this document: 10.5283/epub.9497
Abstract
By laser-interference lithography, reactive-ion etching, and selective wet-chemical etching using a citric acid-based solution, we have fabricated large periodic arrays of AlGaAs microdisks with periods of 4 µm and disk diameters between 1.5 and 2 µm. The arrays are characterized by temperature-dependent photoluminescence spectroscopy. Taking into account the below-threshold absorption of the ...
By laser-interference lithography, reactive-ion etching, and selective wet-chemical etching using a citric acid-based solution, we have fabricated large periodic arrays of AlGaAs microdisks with periods of 4 µm and disk diameters between 1.5 and 2 µm. The arrays are characterized by temperature-dependent photoluminescence spectroscopy. Taking into account the below-threshold absorption of the quantum wells inside the disks, we get disk quality factors close to the theoretical maximum value. We demonstrate that our technique allows one also to produce one-dimensionally or two-dimensionally coupled arrays of microdisks.
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| Item type | Article | ||||
| Journal or Publication Title | Applied Physics Letters | ||||
| Publisher: | American Institute of Physics | ||||
|---|---|---|---|---|---|
| Volume: | 81 | ||||
| Number of Issue or Book Chapter: | 4; 3 S | ||||
| Page Range: | p. 592 | ||||
| Date | 24 May 2002 | ||||
| Institutions | Physics > Institute of Experimental and Applied Physics > Chair Professor Lupton > Group Christian Schüller | ||||
| Identification Number |
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| Dewey Decimal Classification | 500 Science > 530 Physics | ||||
| Status | Published | ||||
| Refereed | Unknown | ||||
| Created at the University of Regensburg | Unknown | ||||
| Item ID | 9497 |
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