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Fabricating tunable semiconductor devices with an atomic force microscope

Held, R. and Lüscher, S. and Heinzel, Thomas and Ensslin, K. and Wegscheider, Werner (1999) Fabricating tunable semiconductor devices with an atomic force microscope. Applied Physics Letters 75 (8), pp. 1134-1136.

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We fabricated quantum wires of different geometries in Ga[Al]As heterostructures by local oxidation of the semiconductor surface with an atomic force microscope. By magnetotransport measurements at low temperatures on these wires the electronic width is determined and compared to the geometrical width. An extremely small lateral depletion length of the order of 15 nm and a high specularity of the ...


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Item Type:Article
Date:23 August 1999
Institutions:Physics > Institute of Experimental and Applied Physics > Retired Professors > Group Werner Wegscheider
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Subjects:500 Science > 530 Physics
Created at the University of Regensburg:Unknown
Owner: Martin Kaiser
Deposited On:30 Nov 2009 13:06
Last Modified:13 Mar 2014 12:08
Item ID:11004
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