Erbe, A. and Corso, G. and Krommer, H. and Tilke, A. and Richter, Klaus and Blick, Robert
Mechanical Mixing in Nonlinear Nanomechanical Resonators.
Applied Physics Letters 77 (19), pp. 3102-3104.
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The physics of nonlinear dynamics has been studied in detail in macroscopic mechanical systems like the driven classical pendulum. By now, it is possible to build mechanical devices on the nanometer scale with eigenfrequencies on the order of several 100 MHz. In this work, we want to present how to machine such nanomechanical resonators out of silicon-on-insulator wafers and how to ...
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