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Tang, H. X. ; Huang, M. H. ; Roukes, M. L. ; Bichler, Max ; Wegscheider, Werner

Two-dimensional electron-gas actuation and transduction for GaAs nanoelectromechanical systems

Article

Tang, H. X., Huang, M. H., Roukes, M. L., Bichler, Max and Wegscheider, Werner (2002) Two-dimensional electron-gas actuation and transduction for GaAs nanoelectromechanical systems. Applied Physics Letters 81 (20), pp. 3879-3881.

DOI to cite this document: 10.5283/epub.11317


Abstract

We have fabricated doubly clamped beams from GaAs/AlGaAs quantum-well heterostructures containing a high-mobility two-dimensional electron gas (2DEG). Applying an rf drive to in-plane side gates excites the beam's mechanical resonance through a dipole-dipole mechanism. Sensitive high-frequency displacement transduction is achieved by measuring the ac emf developed across the 2DEG in the presence ...

We have fabricated doubly clamped beams from GaAs/AlGaAs quantum-well heterostructures containing a high-mobility two-dimensional electron gas (2DEG). Applying an rf drive to in-plane side gates excites the beam's mechanical resonance through a dipole-dipole mechanism. Sensitive high-frequency displacement transduction is achieved by measuring the ac emf developed across the 2DEG in the presence of a constant dc sense current. The high mobility of the incorporated 2DEG provides low-noise, low-power, and high-gain electromechanical displacement sensing through combined piezoelectric and piezoresistive mechanisms. (C) 2002 American Institute of Physics.



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Details

Item typeArticle
Journal or Publication TitleApplied Physics Letters
PublisherAMER INST PHYSICS
Place of PublicationMELVILLE
Volume81
Number of Issue or Book Chapter20
Page Rangepp. 3879-3881
Date11 November 2002
Date of publication07 Dec 2009 13:22
InstitutionsPhysics > Institute of Experimental and Applied Physics > Alumni or Retired Professors > Group Werner Wegscheider
Identification Number
ValueType
10.1063/1.1516237DOI
Related URLs
URLURL Type
http://link.aip.org/link/?APPLAB/81/3879/1Publisher
Classification
NotationType
07.10.Cm; 85.35.-p; 73.61.Ey; 73.50.Dn; 73.50.GrPACS
KeywordsWIRES;
Dewey Decimal Classification500 Science > 530 Physics
StatusPublished
RefereedUnknown
Created at the University of RegensburgUnknown
Item ID11317

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