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Two-dimensional electron-gas actuation and transduction for GaAs nanoelectromechanical systems

Tang, H. X. ; Huang, M. H. ; Roukes, M. L. ; Bichler, Max ; Wegscheider, Werner
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Date of publication of this fulltext: 07 Dec 2009 13:22


Abstract

We have fabricated doubly clamped beams from GaAs/AlGaAs quantum-well heterostructures containing a high-mobility two-dimensional electron gas (2DEG). Applying an rf drive to in-plane side gates excites the beam's mechanical resonance through a dipole–dipole mechanism. Sensitive high-frequency displacement transduction is achieved by measuring the ac emf developed across the 2DEG in the presence ...

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