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Fabrication of double quantum dots by combining afm and e-beam lithography
Rogge, M. C., Fühner, C., Keyser, U. F., Bichler, Max, Abstreiter, Gerhard, Wegscheider, Werner and Haug, R. J. (2004) Fabrication of double quantum dots by combining afm and e-beam lithography. Physica E Low-dimensional Systems and Nanostructures 21 (2-4), pp. 483-486.Date of publication of this fulltext: 11 Jan 2010 13:31
Article
DOI to cite this document: 10.5283/epub.11955
Abstract
In recent years several attempts have been made to fabricate coupled quantum dots as a crucial element of quantum computing devices. One important challenge is to achieve a reliable control of the interdot tunneling. For this purpose we have combined direct nanolithography by local anodic oxidation (LAO) with standard electron-beam lithography. LAO is used to produce parallel double quantum dots. ...
In recent years several attempts have been made to fabricate coupled quantum dots as a crucial element of quantum computing devices. One important challenge is to achieve a reliable control of the interdot tunneling. For this purpose we have combined direct nanolithography by local anodic oxidation (LAO) with standard electron-beam lithography. LAO is used to produce parallel double quantum dots. Additional metallic split gates are responsible for the control of the interdot coupling. We describe our fabrication scheme and demonstrate the function in low-temperature transport measurements.
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Details
| Item type | Article | ||||
| Journal or Publication Title | Physica E Low-dimensional Systems and Nanostructures | ||||
| Publisher: | Elsevier | ||||
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| Volume: | 21 | ||||
| Number of Issue or Book Chapter: | 2-4 | ||||
| Page Range: | pp. 483-486 | ||||
| Date | March 2004 | ||||
| Institutions | Physics > Institute of Experimental and Applied Physics > Alumni or Retired Professors > Group Werner Wegscheider | ||||
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| Classification |
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| Dewey Decimal Classification | 500 Science > 530 Physics | ||||
| Status | Published | ||||
| Refereed | Unknown | ||||
| Created at the University of Regensburg | Unknown | ||||
| Item ID | 11955 |
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