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Rogge, M. C. ; Fühner, C. ; Keyser, U. F. ; Bichler, Max ; Abstreiter, Gerhard ; Wegscheider, Werner ; Haug, R. J.

Fabrication of double quantum dots by combining afm and e-beam lithography

Rogge, M. C., Fühner, C., Keyser, U. F., Bichler, Max, Abstreiter, Gerhard, Wegscheider, Werner and Haug, R. J. (2004) Fabrication of double quantum dots by combining afm and e-beam lithography. Physica E Low-dimensional Systems and Nanostructures 21 (2-4), pp. 483-486.

Date of publication of this fulltext: 11 Jan 2010 13:31
Article
DOI to cite this document: 10.5283/epub.11955


Abstract

In recent years several attempts have been made to fabricate coupled quantum dots as a crucial element of quantum computing devices. One important challenge is to achieve a reliable control of the interdot tunneling. For this purpose we have combined direct nanolithography by local anodic oxidation (LAO) with standard electron-beam lithography. LAO is used to produce parallel double quantum dots. ...

In recent years several attempts have been made to fabricate coupled quantum dots as a crucial element of quantum computing devices. One important challenge is to achieve a reliable control of the interdot tunneling. For this purpose we have combined direct nanolithography by local anodic oxidation (LAO) with standard electron-beam lithography. LAO is used to produce parallel double quantum dots. Additional metallic split gates are responsible for the control of the interdot coupling. We describe our fabrication scheme and demonstrate the function in low-temperature transport measurements.



Involved Institutions


Details

Item typeArticle
Journal or Publication TitlePhysica E Low-dimensional Systems and Nanostructures
Publisher:Elsevier
Volume:21
Number of Issue or Book Chapter:2-4
Page Range:pp. 483-486
DateMarch 2004
InstitutionsPhysics > Institute of Experimental and Applied Physics > Alumni or Retired Professors > Group Werner Wegscheider
Identification Number
ValueType
10.1016/j.physe.2003.11.054DOI
Classification
NotationType
73.21.La; 73.23.Hk; 73.40.GkPACS
Dewey Decimal Classification500 Science > 530 Physics
StatusPublished
RefereedUnknown
Created at the University of RegensburgUnknown
Item ID11955

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