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Fabrication of double quantum dots by combining afm and e-beam lithography
Rogge, M. C., Fühner, C., Keyser, U. F., Bichler, Max, Abstreiter, Gerhard, Wegscheider, Werner und Haug, R. J. (2004) Fabrication of double quantum dots by combining afm and e-beam lithography. Physica E Low-dimensional Systems and Nanostructures 21 (2-4), S. 483-486.Veröffentlichungsdatum dieses Volltextes: 11 Jan 2010 13:31
Artikel
DOI zum Zitieren dieses Dokuments: 10.5283/epub.11955
Zusammenfassung
In recent years several attempts have been made to fabricate coupled quantum dots as a crucial element of quantum computing devices. One important challenge is to achieve a reliable control of the interdot tunneling. For this purpose we have combined direct nanolithography by local anodic oxidation (LAO) with standard electron-beam lithography. LAO is used to produce parallel double quantum dots. ...
In recent years several attempts have been made to fabricate coupled quantum dots as a crucial element of quantum computing devices. One important challenge is to achieve a reliable control of the interdot tunneling. For this purpose we have combined direct nanolithography by local anodic oxidation (LAO) with standard electron-beam lithography. LAO is used to produce parallel double quantum dots. Additional metallic split gates are responsible for the control of the interdot coupling. We describe our fabrication scheme and demonstrate the function in low-temperature transport measurements.
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| Dokumentenart | Artikel | ||||
| Titel eines Journals oder einer Zeitschrift | Physica E Low-dimensional Systems and Nanostructures | ||||
| Verlag: | Elsevier | ||||
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| Band: | 21 | ||||
| Nummer des Zeitschriftenheftes oder des Kapitels: | 2-4 | ||||
| Seitenbereich: | S. 483-486 | ||||
| Datum | März 2004 | ||||
| Institutionen | Physik > Institut für Experimentelle und Angewandte Physik > Entpflichtete oder im Ruhestand befindliche Professoren > Arbeitsgruppe Werner Wegscheider | ||||
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| Klassifikation |
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| Dewey-Dezimal-Klassifikation | 500 Naturwissenschaften und Mathematik > 530 Physik | ||||
| Status | Veröffentlicht | ||||
| Begutachtet | Unbekannt / Keine Angabe | ||||
| An der Universität Regensburg entstanden | Unbekannt / Keine Angabe | ||||
| Dokumenten-ID | 11955 |
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