Electronic properties of AFM-defined semiconductor nanostructures

DOI to cite this document:: 10.5283/epub.13198

Lüscher, Silvia ; Held, Ryan ; Fuhrer, Andreas ; Heinzel, Thomas ; Ensslin, Klaus ; Bichler, Max ; Wegscheider, Werner

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Date of publication of this fulltext: 02 Mar 2010 13:47

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Abstract

The quest for even smaller and better-controlled semiconductor nanostructures calls for improved nanofabrication techniques. We succeeded in patterning metallic and semiconducting nanostructures by using local oxidation-mediated via a voltage between a conducting surface and a close-by tip of an atomic force microscope (AFM). In particular, we were able to control the electronic properties of ...