Mechanical Mixing in Nonlinear Nanomechanical Resonators

DOI zum Zitieren dieses Dokuments:: 10.5283/epub.1460

Erbe, A. ; Corso, G. ; Krommer, H. ; Tilke, A. ; Richter, Klaus ; Blick, Robert

PDF
(166kB) - Nur für Mitarbeiter des Archivs

Veröffentlichungsdatum dieses Volltextes: 05 Aug 2009 13:29

Alternative Links zum Volltext:DOI Arxiv Verlag

Details

Bibliographische Daten exportieren

Zusammenfassung

The physics of nonlinear dynamics has been studied in detail in macroscopic mechanical systems like the driven classical pendulum. By now, it is possible to build mechanical devices on the nanometer scale with eigenfrequencies on the order of several 100 MHz. In this work, we want to present how to machine such nanomechanical resonators out of silicon-on-insulator wafers and how to ...