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Giessibl, Franz J.

High-speed force sensor for force microscopy and profilometry utilizing a quartz tuning fork

Giessibl, Franz J. (1998) High-speed force sensor for force microscopy and profilometry utilizing a quartz tuning fork. Applied Physics Letters 73 (26), S. 3956-3958.

Veröffentlichungsdatum dieses Volltextes: 10 Jul 2012 14:20
Artikel
DOI zum Zitieren dieses Dokuments: 10.5283/epub.25327


Zusammenfassung

Force sensors are key elements of atomic force microscopes and surface profilometers. Sensors with an integrated deflection meter are particularly desirable. Here, quartz tuning forks as used in watches are utilized as force sensors. A novel technique is employed which simplifies the interpretation of the data and increases the imaging speed by at least one order of magnitude compared to previous ...

Force sensors are key elements of atomic force microscopes and surface profilometers. Sensors with an integrated deflection meter are particularly desirable. Here, quartz tuning forks as used in watches are utilized as force sensors. A novel technique is employed which simplifies the interpretation of the data and increases the imaging speed by at least one order of magnitude compared to previous implementations. The variation of the imaging signal with distance fits well to a Hertzian contact model. Images of compact discs and calibration gratings, which have been obtained with scanning speeds up to 230 μm/s, are presented.



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Details

DokumentenartArtikel
Titel eines Journals oder einer ZeitschriftApplied Physics Letters
Verlag:American Institute of Physics
Band:73
Nummer des Zeitschriftenheftes oder des Kapitels:26
Seitenbereich:S. 3956-3958
Datum28 Dezember 1998
InstitutionenPhysik > Institut für Experimentelle und Angewandte Physik > Lehrstuhl Professor Giessibl > Arbeitsgruppe Franz J. Giessibl
Identifikationsnummer
WertTyp
10.1063/1.122948DOI
Dewey-Dezimal-Klassifikation500 Naturwissenschaften und Mathematik > 530 Physik
StatusVeröffentlicht
BegutachtetJa, diese Version wurde begutachtet
An der Universität Regensburg entstandenUnbekannt / Keine Angabe
URN der UB Regensburgurn:nbn:de:bvb:355-epub-253275
Dokumenten-ID25327

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