High-speed force sensor for force microscopy and profilometry utilizing a quartz tuning fork

URN to cite this document:: urn:nbn:de:bvb:355-epub-253275
DOI to cite this document:: 10.5283/epub.25327

Giessibl, Franz J.

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Date of publication of this fulltext: 10 Jul 2012 14:20

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Abstract

Force sensors are key elements of atomic force microscopes and surface profilometers. Sensors with an integrated deflection meter are particularly desirable. Here, quartz tuning forks as used in watches are utilized as force sensors. A novel technique is employed which simplifies the interpretation of the data and increases the imaging speed by at least one order of magnitude compared to previous ...