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Müller, K. ; Rosenauer, A. ; Schowalter, M. ; Zweck, Josef ; Fritz, R. ; Volz, K.

Strain Measurement in Semiconductor Heterostructures by Scanning Transmission Electron Microscopy

Müller, K., Rosenauer, A. , Schowalter, M., Zweck, Josef, Fritz, R. und Volz, K. (2012) Strain Measurement in Semiconductor Heterostructures by Scanning Transmission Electron Microscopy. Microscopy and Microanalysis 18, S. 995-1009.

Veröffentlichungsdatum dieses Volltextes: 30 Sep 2016 08:48
Artikel
DOI zum Zitieren dieses Dokuments: 10.5283/epub.34580


Zusammenfassung

This article deals with the measurement of strain in semiconductor heterostructures from convergent beam electron diffraction patterns. In particular, three different algorithms in the field of (circular) pattern recognition are presented that are able to detect diffracted disc positions accurately, from which the strain in growth direction is calculated. Although the three approaches are very ...

This article deals with the measurement of strain in semiconductor heterostructures from convergent beam electron diffraction patterns. In particular, three different algorithms in the field of (circular) pattern recognition are presented that are able to detect diffracted disc positions accurately, from which the strain in growth direction is calculated. Although the three approaches are very different as one is based on edge detection, one on rotational averages, and one on cross correlation with masks, it is found that identical strain profiles result for an InxGa1-xNyAs1-y/GaAs heterostructure consisting of five compressively and tensile strained layers. We achieve a precision of strain measurements of 7-9.10(-4) and a spatial resolution of 0.5-0.7 nm over the whole width of the layer stack which was 350 nm. Being already very applicable to strain measurements in contemporary nanostructures, we additionally suggest future hardware and software designs optimized for fast and direct acquisition of strain distributions, motivated by the present studies.



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Details

DokumentenartArtikel
Titel eines Journals oder einer ZeitschriftMicroscopy and Microanalysis
Verlag:CAMBRIDGE UNIV PRESS
Ort der Veröffentlichung:NEW YORK
Band:18
Seitenbereich:S. 995-1009
Datum2012
InstitutionenPhysik > Institut für Experimentelle und Angewandte Physik > Entpflichtete oder im Ruhestand befindliche Professoren > Lehrstuhl Professor Back > Arbeitsgruppe Josef Zweck
Identifikationsnummer
WertTyp
10.1017/S1431927612001274DOI
Stichwörter / KeywordsIMAGING CONDITIONS; LAYERS; DEVICES; ERROR; HREM; strain measurement; electron diffraction; TEM; CBED; STEM; semiconductors
Dewey-Dezimal-Klassifikation500 Naturwissenschaften und Mathematik > 530 Physik
StatusVeröffentlicht
BegutachtetJa, diese Version wurde begutachtet
An der Universität Regensburg entstandenJa
URN der UB Regensburgurn:nbn:de:bvb:355-epub-345803
Dokumenten-ID34580

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