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- URN zum Zitieren dieses Dokuments:
- urn:nbn:de:bvb:355-epub-345803
- DOI zum Zitieren dieses Dokuments:
- 10.5283/epub.34580
Zusammenfassung
This article deals with the measurement of strain in semiconductor heterostructures from convergent beam electron diffraction patterns. In particular, three different algorithms in the field of (circular) pattern recognition are presented that are able to detect diffracted disc positions accurately, from which the strain in growth direction is calculated. Although the three approaches are very ...
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