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Co-sputtered MoRe thin films for carbon nanotube growth-compatible superconducting coplanar resonators

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Götz, Karl J. ; Blien, Stefan ; Stiller, Peter L. ; Vavra, Ondrej ; Mayer, Thomas ; Huber, Thomas ; Meier, Thomas Norbert G. ; Kronseder, Matthias ; Strunk, Christoph ; Hüttel, Andreas K.
Date of publication of this fulltext: 17 Oct 2016 14:01


Molybdenum rhenium alloy thin films can exhibit superconductivity up to critical temperatures of T-c = 15 K. At the same time, the films are highly stable in the high-temperature methane/hydrogen atmosphere typically required to grow single wall carbon nanotubes. We characterize molybdenum rhenium alloy films deposited via simultaneous sputtering from two sources, with respect to their ...


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