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Anisotropic etching of graphene in inert and oxygen atmospheres

Oberhuber, Florian ; Blien, Stefan ; Schupp, Felix ; Weiss, Dieter ; Eroms, Jonathan


We study the selective preparation of graphene zigzag edges by crystallographically anisotropic etching processes. Exfoliated graphene on a set of substrates is heated at various temperatures in argon atmospheres with different oxygen concentrations in the ppm range. The removal of carbon atoms from armchair sites at predefined antidots is studied by scanning electron and force microscopy. The ...


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