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Extracting the shape of nanometric field emitters

Beinke, Daniel ; Bürger, Felicitas ; Solodenko, Helena ; Acharya, Rachana ; Klauk, Hagen ; Schmitz, Guido



Abstract

The high resolution nanoanalysis by atom probe tomography is based on needle-shaped samples that represent nanometric field emitters with typical curvature radii of 50 nm. After field desorption and detection of a large set of atoms, the sample volume has to be numerically reconstructed. Conventionally, this reconstruction is performed with the assumption of a hemispherical apex. This established ...

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