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Stepwise Fabrication and Optimization of Coplanar Waveguide Resonator Hybrid Devices

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Kellner, Nicole ; Hüttner, Niklas ; Will, Marco ; Hakonen, Pertti ; Hüttel, Andreas K.
Date of publication of this fulltext: 04 Jul 2023 06:27

This publication is part of the DEAL contract with Wiley.


From the background of microwave-optomechanical experiments involving carbon nanotubes, the optimization of superconducting coplanar waveguide resonator devices is discussed. Two devices, one with unmodified geometry compared to previous work and one integrating several improvements, are lithographically built up step-by-step. After each step, the low-temperature GHz transmission properties are ...


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